MAT-VAC Technology, Inc. - MVT 2486-BSS

MVT 2486-BSS
Batch Sputtering System for
R&D and Production Sputtering


Introduction/Background


MVT 2486-BSS
The new MAT-VAC MVT 2486-BSS Batch Sputtering System has been created as a direct result of customer demand for a modern batch sputtering system that incorporates the proven process capabilities of the highly popular, widely accepted, Perkin-Elmer Model 2400/4400 and the Materials Research Corp. (MRC) Model 8667/8671 discontinued sputtering systems.

MAT-VAC has designed the MVT 2486-BSS with many of the desirable mechanical features of the P-E and MRC designs in combination with modernized electronics, up-to-date instrumentation/controls and increased reliability through the use of modern components.

The original P-E and MRC circular/round sputtering cathode assemblies with their highly characterized and well documented thin film sputter deposition performance characteristics are available with the MVT 2486-BSS. This is in addition to many other sputtering cathode/gun options which are also available.

This greatly benefits companies which have existing inventories of sputtering targets already bonded to P-E/MRC backing plates and proven sputter processes built around thin film results typically obtained from P-E/MRC sputtering cathodes/sources in two (2) major respects; a) inter-changeability of sputtering targets eliminates the need for having an excess inventory of sputtering targets bonded to different backing plates and b) obtaining process repeatability that is especially important in the case of Mil-Spec and other approved thin film deposition processes that mandate the use of a particular sputter coating tool.

The result is a truly modern batch sputtering system, but with a proven performance history.



Thin Film Applications
  • R&D
    		•
  • Nano-Technology
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  • Hybrid Circuits
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  • Magnetic Media
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  • Discrete Components
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  • GaAs Devices
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  • Integrated Circuits (ICs)
    		•
  • Solar Cells
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  • Liquid Crystal Displays
    		•
  • Fiber Optics
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  • Optics
    		•
  • Decorative
    		•


    System Photos:

  • See Photos of the MVT 2486-BSS Sputtering System
  • See Photos of the MAT-VAC Optional In-Line Load Lock System

    Additional Related Literature/Documentation:

  • MVT 2486-BSS Features/Specifications

    System Drawings:

    Please click the following thumbnails to see larger drawings of the MVT 2486-BSS.


    Front View
    Side View
    Top View


    Request a Quotation:
    • To request a quotation on one of MAT-VAC's Thin Film Systems, please fill out our request for quote form by clicking here.