1	Master Power ON Failure
2	Safe to Start Failure - Chamber Vac
3	Safe to Start Failure - Turbo Water
4	Safe to Start Failure - Cathode Water
5	Safe to Start Failure - Network Water
101	Carrier Commanded to P1 when Elevator in way	   
102	Carrier - Either upper gripper down	   
103	Carrier Commanded to P1 when Gripper in way	   
104	Carrier Commanded to P1 and Pallet Dropped	   
105	Carrier Commanded to 5, 6, or 7 and etch platform not at rear	   
106	Carrier Commanded to 5, 6, or 7 and R gripper misposition	   
107	Carrier Commanded to 5, 6, or 7 and Pallet Dropped	   
108	Carrier Stalled. More than 10 minutes	   
109	Carrier Wrong direction from 3 to 2	   
110	Carrier Wrong direction from 1 to 2	   
111	Carrier Wrong direction from 4 to 3	   
112	Carrier Wrong direction from 2 to 3	   
113	Carrier Wrong direction from 5 to 4	   
114	Carrier Wrong direction from 3 to 4	   
115	Carrier Wrong direction from 6 to 5	   
116	Carrier Wrong direction from 4 to 5	   
117	Carrier Wrong direction from 7 to 6	   
118	Carrier Wrong direction from 5 to 6	   
201	Shutter Command to A when Elev not at LL	   
202	Shutter Stalled. More than 20 Seconds	   
203	Shutter - Wrong Direction when commanded to B	   
301	Elevator - UL Gripper Down	   
302	Elevator - Shutter not at B or C	   
303	Elevator - Gasses on (DISABLED)	   
304	Elevator Crash Avoidence	   
305	Elevator - Carrier last seen at 1 or 2, or 3 heading left	   
306	Elevator - (DISABLED)	   
307	Elevator Jammed (>3S for move)	   
308	Elevator Jammed Running > 2 minutes	   
401	Can't Raise UL gripper if LL isn't down (drops pallet)	   
402	Can't Raise LL gripper if UL isn't down (drops pallet)	   
403	Can't Raise UR gripper if LR isn't down (drops pallet)	   
404	Can't Raise LR gripper if UR isn't down (drops pallet)	   
405	Can't move L grippers if elevator is at load lock	   
406	Can't Move UL gripper down if Carrier is at P2
407	Can't Move LL gripper up if Carrier is at P2
408	Gripper Stalled. More than 10 seconds	   
501	Etch - R Grippers Mispositioned	   
502	Etch - (DISABLED)	   
503	Etch Platform commanded forward while RF is on	   
601	LLPD - Very Gross Leak (Can't reach SP1 after 20S)	   
602	LLPD - Fine Leak (Can't reach SP2 after 30S)	   
603	LLPD - Turbo not at speed after 10 minutes	   
604	LLPD - Very Fine Leak (Can't reach SP3 after 10 minutes)