The NEW Price/Performance Leader:
The MAT-VAC MVT-94X, 90X, 64X, 60X and 8X Series
Advanced Features Our Competitors Can′t Match
Click images for larger pictures...
One of the great things about the New MAT-VAC Universal Sputterer™ systems is that when you purchase one, you're getting the most technologically advanced in line load lock batch sputtering system available today! Not only is the operation "one button" simple, but everything about the system has been designed to maximize productivity and minimize downtime!
Take the MAT-VAC Challenge: Compare our technology to any other sputtering system OEM and see for yourself our level of features — and then compare the price tags!
- Remote Access Support Program (RASP)
- MAT-VAC's innovative state-of-the-art Universal Sputterer PLC GUI design allows MAT-VAC the capability to download software updates, revisions, fixes and diagnose software/hardware problems over a secure, virus protected, high speed internet connection from its Florida, USA based headquarters location or any other location. Learn more.
- Advanced Pallet Handling
- Carrier speed is Calibrated and this calibration can be done at actual process speeds.
- All digital control means no speed "hunting" during scans, giving smoother films.
- Self compensating carrier drive system allows precise control over the deposition thickness independent of wear on the drive.
- Precise, continuous, carrier position feedback allows automatic, dynamic, acceleration and deceleration during all motions - smoother pallet handling means less down time and better film quality.
- Automatic Pallet Re-alignment. No more skewed pallets causing crashes!
- Automatic Safety Stop on Pallet Loss. Reduced down time = higher productivity and lower lifecycle costs. Expensive pallet crashes are reduced if not completely eliminated!
- Advanced Scan Options — all with "shortest path" logic:
- Single Pass
- Multi-pass
- 1/2 scan (saves when sputtering precious/rare materials on smaller objects)
- Manual indexing and positioning to the nearest .007"!
- Simplified external drive train increases reliability and reduces particulates in your clean room. Easier maintenance too!
- No position loss during "by hand" testing.
- Automatic Zero Calibration.
- Built in "Open Air" and "in situ" exchange tests.
- Anti-crash logic is always enabled, even during manual moves!
- MAT-VAC innovative software allows use of the water cooled RF Etch station as a cooling platform at any point in a recipe. Unlimited recipe steps means that you can cycle temperature sensitive parts alternating between deposition steps and cooling steps. Better, thicker, deposition without damaging your temperature sensitive substrate materials.
- Advanced Power Handling
- Slope controlled power ramping assures soft start on thermally fragile targets. This both protects the target itself and reduces the need to pre-sputter or target cleaning.
- Both DC and RF are available in the same chassis using advanced, solid state, power supplies - no more primitive vacuum tube dinosaurs!
- Dynamic RF Auto-tune and "learn" mode for setting tuning presets for each target and etch platform independently.
- Power levels and Feedback Levels are automatically logged and charted giving you unsurpassed process control and process verification. Graphs from each and every "sputter event" can be selectively printed to document performance. Individual run logging files give historical graphs at any time without giant log files.
- Automatic RF VSWR (WFwd / WRev) computation safely shuts down the RF section in the event of a severe, extended, VSWR mismatch.
- Advanced power fault monitoring watches your process for signs of arcing and plasma quenching — severe events are logged.
- Independent target and RF network water cooling systems assure operation at high sputter power, increasing throughput by reducing sputter times.
- Preset strike and power ramp levels assure proper target warm up even during manual operation/testing.
- Igniter-less Ignition and Real-time Gas Control
- MAT-VAC's sophisticated controls allow igniter-less ignition even when sputtering RF. MAT-VAC's unique "gas burst" technology assures ignition and saves on expensive process gasses. You can actually see the gas burst in the automatically generated run plots.
- No more operators "tweaking" the gas to get ignition and then failing to reset to the correct process level - Less rejected parts!
- Precise gas control in both metering and measuring.
- Process gas pressure feedback is automatically logged and plotted along side the power levels for unprecedented precision in your thin films. Graphs show process limits as well as actual settings.
- The gas system is a closed loop control system that responds dynamically to changing conditions.
- Gas control is precise enough for consistent reactive sputtering of oxides or nitrides.
- Automatic process gas shutoff means fewer cryo regenerations and faster High-Vac recovery.
- Diagnostic Maintenance Panel (DMP)
- The lockable Diagnostic Maintenance Panel (DMP) Allows complete manual control of all valves and motion systems even during "computer off" operations.
- Safety is not sacrificed in manual mode. Standard manual mode preserves valve interlocks, advanced manual mode allows safety bypass to force any valve. Key lock disables all manual control.
- Built in Digital Panel Meter allows manual monitoring of critical system voltages, (commanded power, power feedback, etc.)
- Clear, unambiguous layout and colors minimize manual operation errors and show status at a glance in fully automatic modes.
- All Modular Design
"Ease of service" is designed in, not an afterthought!
- All Electronic panels have no-tool connector disconnects using industrial quality locking circular connectors. No more miss-mated cables!
- Clearly marked cables and connection points.
- Clean, uncluttered chassis allows access to all connections without a contortionist.
- Major assemblies are generally on a single panel and can be changed in minutes.
- Modular Pneumatics simplifies valve control and minimizes chassis electrical wiring.
- Modular PLC and control system has built in diagnostics and are known for years of trouble free operation.
- Quick disconnect fittings are used where-ever possible (roughing lines, pneumatics, water flow) to both simplify and speed troubleshooting/repairs.
- Commercial off the Shelf (COTS) Components reduce the lifecycle costs and break the tyranny of "single vendor" spares.
- All chassis I/O is done thru a single, severable panel. The panel folds down for easy access and forms a tool shelf. Thumb screws assure easy access.
- Optical Sensing
External mechanical position switches and indicators have been engineered with reliable, precision, optical sensors and long life LED's.
- Carrier Motion - Carrier position is determined by an optical encoder, no more chains with dogs and mechanical position switching. Non-contact optical sensing assures long life and no wear vs conventional resistive position sensing.
- Elevator Motion - Elevator position is sensed by non-contacting optical interrupter switches. These have built-in indicators for rapid test and diagnostics. Simplified alignment coupled with non-contacting actuation assures that once set, the switches will not "wander" out of alignment and cause costly crashes.
- Optical Switches w/indicators on Etch Platform Position.
- Optical Switches w/indicators on Gate Valve(s).
- Optical Switch w/indicator on Load Lock Door. Good-To-Go (GTG) operator confirmation prevents accidental cycle start by "bumping" the Load Lock Door, common in less-sophisticated systems.
- Technician Friendly
- Manual Controls operate with safeties even during "no computer" operation.
- Internally online documentation is available from within the program itself. CD-Rom can also be installed at the technician's workstation.
- Hyperlinked documentation allows rapid convergence on any part of the system and puts the complete parts book and assembly drawings at your fingertips.
- Multi-media presentation of critical operations makes procedures clear and unambiguous.
- Configuration and calibration diagnostics both in the PLC and PC.
- KF "quick-disconnect" vacuum flanges/fittings are used on the valves and roughing lines for "no tools" maintenance. Elimination of un-necessary valves simplifies operation, reduces costs and component counts, and increases overall reliability.
- The chassis layout is clean and uncluttered for easy maintenance access. The separate and severable control rack makes system relocation easier.
- Power distribution is thru the separate rack with twist lock connections to the modern, solid state, RF and DC power supplies.
- Extensive test sequences built in with the Good-To-Go (GTG) button as a confirmation.
- Software configuration of many control settings allow the PLC controls to be fine tuned without a service call.
- Diagnostic reporting includes:
- Twinkle Board status indicator
- Per Run Logging
- Detailed command-by-command logging
- Speed Calibration
- Configuration Control Reports
- Color Offline Run Plots
- Mechanical Simplicity. An elegantly designed front panel with LED indicators replaces the mechanically cumbersome, particulate generating, system of gears, shafts, bearings, pulleys and chains. This eliminates the mechanical complexity and failures of the antiquated "clackety-clack" control and indicator system.
- User Friendly
- Simple, "one button" operation.
- Fully Automated Pump Down.
- Fully Automated Scanning.
- Fully Automated Cryo Regeneration.
- Fully Automatic RF Tuning with "Learn" for all targets and etch.
- Heat Option.
- Cool Option.
- Network compatible allows remote monitoring of system status.
- Simplified programming makes recipe creation fast and easy.
- Unlimited steps in recipes.
- Unlimited recipes.
- Recipes can pause to allow data entry during runs.
- Separate User (production) and Maintenance (test) recipes.
- Automatic Process Logging.
- Automatic Plotting of sputter Events and process parameters.
- No hidden files and all-ASCII control files make backups and documentation of recipes a snap.
Regardless of your particular requirement, MAT-VAC will strive to serve you.
Please contact MAT-VAC with any questions you may have concerning our capabilities.
| If the competition is: |
Then MAT-VAC is: |
| Used, "as-is" |
New and running right after delivery and be producing parts for the year (typically), verses the year your in-house staff will spend struggling to get the used, as-is system operating. If and when you DO get the system running, what have you got but someone else's 30 year old obsolete system?
Why not take advantage of MAT-VAC′s Trade-Up / Exchange Program and benefit from the capital asset depreciation tax write off. It PAYS to go with MAT-VAC, the NEW Price Performance Leader
Good Luck on finding obsolete MRC & Techware electronic/PCB's, not to mention (the lack of) software support. Even if you can find the "unobtainable", be prepared for long lead times and "sticker shock". Can your company afford the costly downtime - costly in both cost to repair and loss of production while your technical staff hunts for essentially un-available components? Why operate your sputtering operation on the "hairy-edge" when a much more cost effective machine is available now!
These "Used, as-is" systems can even pose severe Safety Hazards to your personnel! |
| Used, Rebuilt |
New and running right after delivery, verses even when you DO get the system running, what have you got but someone else's 30 year old obsolete system?
Why not take advantage of MAT-VAC′s Trade-Up / Exchange Program and benefit from the capital asset depreciation tax write off. It PAYS to go with MAT-VAC, the NEW Price Performance Leader
Good Luck on finding obsolete MRC & Techware electronic/PCB's, not to mention (the lack of) software support. Even if you can find the "unobtainable", be prepared for long lead times and "sticker shock". Can your company afford the costly downtime - costly in both cost to repair and loss of production while your technical staff hunts for essentially un-available components? Why operate your sputtering operation on the "hairy-edge" when a much more cost effective machine is available now! In any old, obsolete, system downtime isn't the exception, it's the rule!
These "Used, Rebuilt" systems can even pose severe Safety Hazards to your personnel! |
| New, Comparably Priced |
More sophisticated automation with more advanced features, including Remote Access Support Program (RASP). Learn more. |
| New, Comparably Featured |
Compare the Price! Why pay more?
|
All-in-all, MAT-VAC stands by its claim to having the best price/performance in the field. Move up to superior film quality and reliability, as well as ease of operation, that only a new, modern, MAT-VAC MVT-94X, 90X, 64X, 60X and 8X series Universal Sputterer™ can provide.
|
|
|
|
