MVT-8X Series Sputtering System
VAC-LOC™ Load Lock

MAT-VAC has designed an innovative load lock transfer apparatus for use with its MVT-8X Series R&D/Pilot Production Sputtering System.

Two (2) models of the MAT-VAC VAC-LOC™ Load Lock are available- a manually operated version, as shown in the accompanying photos, and a fully automatic version.

Exclusive design features of the MAT-VAC VAC-LOC™ Load Lock consist of an internal electro-pneumatically actuated “flapper valve” which completely eliminates the need for an expensive separate high vacuum gate valve and the use of four (4) nominal 7" diameter substrate holders/pallets onto which the wafers/substrates are placed. This indirect handling of substrates contrasts very favorably with the direct handling of individual wafers/substrates by competitive manufacturer designs which typically employ an end effector that may contribute to substrate “edge damage”, especially when very fragile substrates are processed. The VAC-LOC™ design greatly minimizes the possibility of substrate damage during transfer into/out of the main deposition process chamber.

The nominal 7" diameter substrate holders/pallets are positioned onto the rotating water-cooled substrate table of the MVT-8X Series Sputtering System at 90° index intervals. The substrate holders/pallets can be “nested” to the customer’s specific wafer or substrate size(s). This guards against “shifting” and functions to minimize potential damage during the transfer sequence.

The small compact design of the MAT-VAC VAC-LOC™ Load Lock is rapidly high vacuum pumped by a dedicated turbo-molecular pump during each substrate holder/pallet introduction/removal exchange step.

The MAT-VAC VAC-LOC™ Load Lock is available only when purchased in conjunction with a new MAT-VAC MVT-8X Series Sputtering System.