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of In Line Load Lock Batch Sputtering Systems
and Thin Film Technology

8" Diameter RF Diode


Item Qty Part Number Description
1 221-190-500 Cathode Assembly, 8" RF
1 RF-TGT-TOOL RF Target Assembly Installation Tool
 
     Consisting Of:
 
1. 1 221-190-600 Plate, Backing, RF 8"
2. 1 221-219-600 Screw, Shoulder
3. 2 221-190-700 Cap, Cathode, RF, 8"
4. 1 122-295-170 Fitting, Water
5. 1 221-190-300 Screw, Retaining
6. 1 221-190-400 Nut, Hex
7. 1 121-396-900 O-Ring, Insulator, Outer
8. 1 121-392-600 O-Ring, Insulator, Inner
9. 1 121-392-300 O-Ring, Target Cap, Outer
10. 1 121-395-300 O-Ring, Target Cap, Inner
11. 1 720-664-000 Insulator, Ceramic, RF 8"
 

8" Diameter RF Magnetron

Item Qty Part Number Description
1 221-198-310 Magnet Assembly, For RF Magnetron
 
     Consisting Of:
 
1. 1 720-604-000 Shield Assembly, For 8" Round Targets
2. 1 720-192-010 Cross Contamination Shield
3. 2 720-193-000 Ground Ring
4. 1 221-305-900 Uniformity Shaper, Standard RF
5. 3 122-121-900 Screw, Vented
6. 3 720-909-020 Standoff, Beam Shaper, RF
7. 6 122-124-900 Spacer, Shield Assembly
8. 1 221-198-300 Magnet Assemble
9. 1 221-151-900 Adapter Ring
10. 2 122-118-100 Elbow, 90 Degree Brass 1/4 Poly.
11. 2 122-139-400 Pipe, Nipple 1/8 MPT 300 LG. BR. 113-B
12. 2 121-106-000 Washer, Flat 10. 7/16 OD
13. 1 122-118-000 Stand Off, 1/2 Hex x 2 1/2 Long
14. 1 121-407-000 Screw, Set 10-32 x 75 Long S.S.
15. 2 121-418-000 Tube Fitting Poly. FLO 1/4 Tube x 1/8 4FT
16. 1 221-169-300 Uniformity Shield
17. 2 221-203-000 Shipping Clamp



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