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of In Line Load Lock Batch Sputtering Systems
and Thin Film Technology

MU INSET®1 Cathode Assembly





Consisting Of...
  • Pole Piece Outside Long - OEM Part No. 828-45-003

  • Pole Piece Outside Short - OEM Part No. 828-45-002

  • Pole Piece Center - OEM Part No. 828-01-233

  • Pole Piece End - OEM Part No. 828-01-238

  • MU Target, 4 Piece Construction - OEM Part No. 502D-XXXXX-XXXX

  • Dark Space Shield, MU - OEM Part No. 828-39-100

  • Magnet Assembly, INSET®1 Cathode - OEM Part No. 828-36-400

  • Magnet Assembly, Handle (4x) - OEM Part No. 3030510

  • Water Inlet Manifold - OEM Part No. 828-36-500

  • INSET®1 Backing Plate Brazement, Copper (Cu) - OEM Part No. 828-36-100

  • Teflon Insulator - OEM Part No. 828-20-016

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    1. Note: INSET ® is a registered trademark of Praxair Corp.



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