Contact Us   |  Phone: 888.998.9975  |  Fax: 386.238.0976

Welcome to the NEW Price Performance Leader
of In Line Load Lock Batch Sputtering Systems
and Thin Film Technology

CHI INSET®1 Cathode Assembly





Consisting Of...

  • Pole Piece Outside Long - OEM Part No. 828-36-002

  • Pole Piece Outside Short - OEM Part No. 828-36-003

  • Pole Piece Outside Center - OEM Part No. 828-20-018

  • Pole Piece Outside End - OEM Part No. 828-20-019

  • Teflon Insulator - OEM Part No. 828-20-016

  • Chi Target (4 Piece Construction) - OEM Part No. 501D-XXXXX-XXXX

  • Magnet Assembly, INSET®1 Cathode - OEM Part No. 828-36-400

  • INSET®1 Backing Plate Brazement, Copper (Cu) - OEM Part No. 828-36-100

  • Dark Space Shield, CHI - OEM Part No. 828-36-600

  • Water Inlet Manifold - OEM Part No. 828-36-500


  • 1. Note: INSET ® is a registered trademark of Praxair Corp.



    Terms & Conditions/Warranty   |    Credit Application   |    Disclaimer   |    OEM Policy   |    Privacy Policy   |    Email Us   |    Contact Us
    Copyright © 2001-2008 - MAT-VAC Technology, Inc.   All Rights Reserved.