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of In Line Load Lock Batch Sputtering Systems
and Thin Film Technology

CHI INSET®1 Cathode Assembly





Consisting Of...
  • Pole Piece Outside Long - OEM Part No. 828-36-002

  • Pole Piece Outside Short - OEM Part No. 828-36-003

  • Pole Piece Outside Center - OEM Part No. 828-20-018

  • Pole Piece Outside End - OEM Part No. 828-20-019

  • Teflon Insulator - OEM Part No. 828-20-016

  • Chi Target (4 Piece Construction) - OEM Part No. 501D-XXXXX-XXXX

  • Magnet Assembly, INSET®1 Cathode - OEM Part No. 828-36-400

  • INSET®1 Backing Plate Brazement, Copper (Cu) - OEM Part No. 828-36-100

  • Dark Space Shield, CHI - OEM Part No. 828-36-600

  • Water Inlet Manifold - OEM Part No. 828-36-500

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    1. Note: INSET ® is a registered trademark of Praxair Corp.



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