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of In Line Load Lock Batch Sputtering Systems
and Thin Film Technology

6.5" Diameter RF/DC Magnetron


Item Qty Part Number Description
1 828-06-000 6.5" Diameter RF/DC Magnetron
 
     Consisting Of:
 
1. 1 828-06-001 CATHODE
2. 1 828-06-100 Target B/P, 6 1/2", Copper
3. 1 828-06-200 Weldment, Dark Space Shield, Stainless-Steel
4. 1 808-01-801 PYREX COLLAR
5. 1 808-01-805 GASKET, LARGE
6. 1 808-01-806 GASKET, SMALL
7. 1 808-27-003 COLLAR, 822 CATHODE, UNIVERSAL
8. 2 808-60-002 FITTING
9. 2 808-60-200 Fitting Assembly
10. 1 828-06-008 Power Ring
11. 2 5040100 CLAMP RING 3/8 W/SIDE HOLE
12. 1 828-06-009 Strap. Copper
13. 1 828-06-400 MAGNET ASSY
14. 1 2021480 ORING ID2.737CS103
15. 1 2021560 O-RING,VITON,PARKER
16. 1 2021650 ORING ETCH 8667 6.487X.103 2-165
17. 1 2022520 ORING VITON,2-252 5.234X.139
18. 1 3110240 CAPACITOR 200PF 10% 15KV
19. 2 5012920 FTG,NUT FOR905-01-279
20. 8 6070460 SCREW SHC VENTED 10-32 X3/8
21. 1 6070840 SEALSCREW PLANAR 10/32X1PH W/VITON 2-008

This OEM Drawing is for Reference Purposes Only.



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