MAT-VAC Technology, Inc. - Sputtering Cathode Assemblies

Sputtering Cathode Assemblies

Perkin-Elmer OEM Equivalent Sputtering Cathode Assemblies
  • Delta RF/DC Magnetron
    OEM Part No. 221-313-000

  • 8" Diameter DC Magnetron
    OEM Part No. 221-264-300

  • 8" Diameter RF Diode/Magnetron*
    OEM Part No. 221-190-500

  • 6" Diameter RF Diode
    OEM Part No. 720-145-000

  • Perkin-Elmer Target Backing Plates

  • Popular OEM Backing Plates

    * RF Magnetron, OEM Part No. 221-198-400, requires the addition of the 8" RF Magnetron Assembly, OEM Part No. 221-198-310


    • MRC OEM Equivalent Sputtering Cathode Assemblies
  • 822/8620/8630/8667/8671 Circular Type

  • 900/600 Series INSET®1 Type Cathode Assemblies

  • 902/903/943 Series Planar Rectangular

  • 603/643/662 Series Planar Rectangular

  • MRC Target Backing Plate Configurations

  • Popular OEM Backing Plates
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    1. Note: INSET ® is a registered trademark of Praxair Corp.