MODERNIZED SYSTEM REMANUFACTURING SPECIFICATIONS*

1. The system will be thoroughly inspected and compared to new specifications. Repair will be made wherever necessary, and any item deemed beyond repair will be replaced. These repairs will be performed to produce a product equal to OEM specifications both in function and appearance.

2. Whenever necessary surfaces will be refurbished to conform to the original appearance of the equipment.

3. Painted surfaces will be stripped, prepared, repainted and re-silk screened as required.

4. All motion and load bearing/bushings will be remanufactured and/or replaced with new parts conforming to manufacturer's original specifications.

5. All electrical wiring will be tested. Any needed replacement or repair will be done. All connections will be cleaned and checked and replacement made when excessively worn. All high-use operation switches will be carefully inspected and repaired or replaced to meet original specifications.

6. All pneumatic and hydraulic systems shall be cleaned, inspected, and tested to assure performance to original specifications. All worn, deformed, or weathered components will be replaced with new parts conforming to original specifications. All pneumatic lines will be replaced.

7. All process gas lines and components will be cleaned to meet industry standards. All water cooling lines will be replaced.

8. All assembly, calibration, adjustments or alignments will be done in accordance to original manufacturer's specifications.

9. The process chamber and shields will be completely stripped of all previous accumulated deposits/coatings.

10. All o-ring seals will be replaced. Corresponding sealing surfaces shall be cleaned, inspected, and resurfaced as required. Vacuum System will be Helium leak checked by Helium leak detector.