Sputtering Cathodes

MRC OEM Equivalent Replicated Sputtering Cathode Assemblies

• 6" Diameter Type A RF Diode - OEM Ref. Part No. 808-74-000
• 8" Diameter Type A RF Diode - OEM Ref. Part No. 808-32-000
• 8" Diameter Type B RF Diode - OEM Ref. Part No. 808-96-000
• 6.5" Diameter RF/DC Magnetron - OEM Ref. Part No. 828-06-000
• 8" Diameter DC/RF Magnetron - OEM Ref. Part No. 828-25-000
• MRC Sputtering Target Backing Plates - OEM Ref. Part No. XXX-XX-XXX

• CHI Shaped Targets - OEM Ref. Part No. 828-36-000
• Upsilon Shaped Targets - OEM Ref. Part No. 828-39-000
• MU Shaped Targets - OEM Ref. Part No. 828-45-000

• RF Diode - OEM Ref. Part No. 828-04-000
• RF/DC Magnetron, High Uniformity Magnets - OEM Ref. Part No. 828-56-000
• Model II Magnetron, Dialectric/Reactive - OEM Ref. Part No. 826-68-000

• RF Diode - OEM Ref. Part No. 828-52-000
• RF/DC Magnetron, High Uniformity Magnets - OEM Ref. Part No. 828-50-000
• Model II Magnetron, Dialectric/Reactive - OEM Ref. Part No. 826-68-000

Perkin-Elmer OEM Equivalent Replicated Sputtering Cathode Assemblies

• Delta RF/DC Magnetron - OEM Ref. Part No. 221-313-000
• 8" Diameter DC Magnetron - OEM Ref. Part No. 221-264-300
• 8" Diameter RF Diode/Magnetron* - OEM Ref. Part No. 221-190-500
• 6" Diameter RF Diode - OEM Ref. Part No. 720-145-000