MRC Type Kits / Speciality Parts
| Upgrade Kits for MRC 902M and 903M Manuel Systems |
High Vac Load Lock Kit
This kit is designed to convert an existing MRC 902M/903M sputtering system with rough vacuum "Clam Shell" style load lock chamber to the high vacuum MRC 942/943 type load lock.
Items included in kit:
- MRC type Model 942/943 load lock dome with MAT-VAC design improvements and hinged front access door with viewport
- Parts required to convert the existing MRC 902/903 load lock elevator to the MRC type 942/943 (bottom level rails, upper level pallet shelf/tray)
- 5 each Load lock dome clamping bars for securing the dome to the 902/903 top plate
- 1 set of pallet guide rails
- A drawing indicating the layout of 9 blind tapped holes to provide the customer with information on modifying the 902/903 top plate to accept the 942/943 type load lock chamber
- Heavy duty top plate lift brackets
- Cryo pump regeneration temperature/pressure panel
- 1 each 942/943 Stainless Steel flat pallet
Items not included in kit:
- High vacuum gate valve
- CTI-8 cryo pump with regen/purge valve equipped with diode sensor for remote temperature monitoring
- CTI cryo pump compressor and He cryo lines
- Granville Philips Model 307 Ion Gauge controller with set point module
Note: Some modifications to the existing MRC 902/903 sputtering system will be required to be performed by the customer in order to integrate the functioning of the new 942/943 type load lock chamber.
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