8" DC Magnetron
|
Item |
Qty |
Part Number |
Description |
|
1. |
1 |
221-264-300 |
Cathode Assembly, 8" DC Magnetron |
| |
| Consisting Of: |
| |
|
2. |
1 |
221-219-600 |
Screw, Shoulder |
|
3. |
2 |
121-106-000 |
Washer, Flat |
|
4. |
1 |
122-118-000 |
Standoff |
|
5. |
2 |
29-001030-01 |
Water Fitting |
|
6. |
2 |
178-157-000 |
Pipe Nipple |
|
7. |
3 |
176-013-000 |
Screw, Socket Head |
|
8. |
1 |
221-250-400 |
Adjustment Ring |
|
9. |
1 |
121-397-000 |
O-Ring, Insulator, Outer |
|
10. |
1 |
121-396-700 |
O-Ring, Insulator, Inner |
|
11. |
1 |
221-250-200 |
Insulator, Ceramic |
|
12. |
1 |
221-249-400 |
Backing Plate Assembly |
|
13. |
1 |
120-018-000 |
O-Ring, Cap, Outer |
|
14. |
1 |
122-140-200 |
O-Ring, Cap, Inner |
|
15. |
1 |
221-249-500 |
Cap, Water Sealing |
|
16. |
6 |
172-176-000 |
Screw, Socket Head |
|
17. |
1 |
121-407-000 |
Screw, Set |
|
18. |
1 |
221-250-100 |
Magnet Assemble, 8" DC |
|
19. |
1 |
221-249-600 |
Support Ring |
|
20. |
1 |
221-249-700 |
Center Post |
|
21. |
1 |
221-249-700 |
Pole Piece, Inner |
|
22. |
1 |
221-142-000 |
Top Cover |
|
23. |
A/R |
See Note 1 |
Spacer |
|
24. |
1 |
221-156-900 |
Outer Cylinder |
|
25. |
1 |
176-031-000 |
Screw, Socket Head |
|
26. |
3 |
177-509-000 |
Screw, Pan Head |
|
27. |
12 |
122-204-100 |
Magnet |
|
28. |
1 |
720-604-000 |
Shield Assembly, For 8" Round Targets |
|
29. |
1 |
720-192-010 |
Cross Contamination Shield |
|
30. |
2 |
720-193-000 |
Ground Ring |
|
31. |
1 |
221-198-800 |
Uniformity Shaper, Stander DC |
|
32. |
3 |
122-121-900 |
Screw, Vented |
|
33. |
3 |
720-909-000 |
Standoff, Beam Shaper DC |
|
34. |
6 |
122-124-900 |
Spacer, Shield Assembly |
|
35. |
N/A |
N/A |
8" Diameter Sputtering Target |
|
|
|
|
|
