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RF/DC Magnetron, High Uniformity Magnets
Consisting Of...
900/600 Series Copper Planar
- OEM Ref. Part No.
899-00-382
Dark Space Shield
- OEM Ref. Part No.
828-04-300
Cathode Plate
- OEM Ref. Part No.
828-21-001
Teflon Insulators & Planar Target
Water Baffle, Magnetron
- OEM Ref. Part No.
828-05-003
MRC Type Handle
- OEM Ref. Part No.
3030270
High Uniformity Magnet Assembly
- OEM Ref. Part No.
899-99-267
PVD Systems Related:
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Replacement Parts
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Sputtering Cathodes
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Specialized Tools
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Backing Plates
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MAT-VAC Technology, Inc.
PO Box 2299
Daytona Beach, FL 32115
Tel: (386) 238-7017 | Fax: (386) 238-0976
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