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MU INSET®
1
Cathode Assembly
Consisting Of...
Pole Piece Outside Long
- OEM Ref. Part No.
828-45-003
Pole Piece Outside Short
- OEM Ref. Part No.
828-45-002
Pole Piece Inner Center
- OEM Ref. Part No.
828-01-233
Pole Piece Inner End
- OEM Ref. Part No.
828-01-238
MU Target, 4 Piece Construction
- OEM Ref. Part No.
502D-XXXXX-XXXX
Dark Space Shield, MU
- OEM Ref. Part No.
828-39-100
Magnet Assembly, INSET®
1
Cathode
- OEM Ref. Part No.
828-36-400
Magnet Assembly, Handle (4x)
- OEM Ref. Part No.
3030510
Water Inlet Manifold
- OEM Ref. Part No.
828-36-500
INSET®
1
Backing Plate Brazement, Copper (Cu)
- OEM Ref. Part No.
828-36-100
Teflon Insulator
- OEM Ref. Part No.
828-20-016
1. Note: INSET ® is a registered trademark of Praxair Corp.
PVD Systems Related:
-
Replacement Parts
-
Sputtering Cathodes
-
Specialized Tools
-
Backing Plates
Associated Links:
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MAT-VAC Technology, Inc.
PO Box 2299
Daytona Beach, FL 32115
Tel: (386) 238-7017 | Fax: (386) 238-0976
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