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Upsilon INSET®
1
Cathode Assembly
Consisting Of...
Teflon Insulator
- OEM Ref. Part No.
828-20-016
Magnet Assembly, INSET®
1
Cathode
- OEM Ref. Part No.
828-36-400
INSET®
1
Backing Plate Brazement, Copper (Cu)
- OEM Ref. Part No.
828-36-100
Dark Space Shield, Upsilon
- OEM Ref. Part No.
828-39-100
Water Inlet Manifold
- OEM Ref. Part No.
828-36-500
INSET®
1
Copper Target Clamping Bars
- MAT-VAC Part No.
101M
This OEM Drawing is for Reference Purposes Only.
PVD Systems Related:
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Replacement Parts
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Sputtering Cathodes
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Specialized Tools
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Backing Plates
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PO Box 2299
Daytona Beach, FL 32115
Tel: (386) 238-7017 | Fax: (386) 238-0976
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