CHI INSET®
1
Cathode Assembly
Consisting Of...
Pole Piece Outside Long
- OEM Ref. Part No.
828-36-002
Pole Piece Outside Short
- OEM Ref. Part No.
828-36-003
Pole Piece Outside Center
- OEM Ref. Part No.
828-20-018
Pole Piece Outside End
- OEM Ref. Part No.
828-20-019
Teflon Insulator
- OEM Ref. Part No.
828-20-016
Chi Target (4 Piece Construction)
- OEM Ref. Part No.
501D-XXXXX-XXXX
Magnet Assembly, INSET®
1
Cathode
- OEM Ref. Part No.
828-36-400
INSET®
1
Backing Plate Brazement, Copper (Cu)
- OEM Ref. Part No.
828-36-100
Dark Space Shield, CHI
- OEM Ref. Part No.
828-36-600
Water Inlet Manifold
- OEM Ref. Part No.
828-36-500
1. Note: INSET ® is a registered trademark of Praxair Corp.
PVD Systems Related:
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MAT-VAC Technology, Inc.
PO Box 2299
Daytona Beach, FL 32115
Tel: (386) 238-7017 | Fax: (386) 238-0976
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