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CHI INSET® 1 Cathode Assembly





Consisting Of...

  • Pole Piece Outside Long - OEM Ref. Part No. 828-36-002

  • Pole Piece Outside Short - OEM Ref. Part No. 828-36-003

  • Pole Piece Outside Center - OEM Ref. Part No. 828-20-018

  • Pole Piece Outside End - OEM Ref. Part No. 828-20-019

  • Teflon Insulator - OEM Ref. Part No. 828-20-016

  • Chi Target (4 Piece Construction) - OEM Ref. Part No. 501D-XXXXX-XXXX

  • Magnet Assembly, INSET®1 Cathode - OEM Ref. Part No. 828-36-400

  • INSET®1 Backing Plate Brazement, Copper (Cu) - OEM Ref. Part No. 828-36-100

  • Dark Space Shield, CHI - OEM Ref. Part No. 828-36-600

  • Water Inlet Manifold - OEM Ref. Part No. 828-36-500

  • 1. Note: INSET ® is a registered trademark of Praxair Corp.
    PVD Systems Related:
    - Replacement Parts
    - Sputtering Cathodes
    - Specialized Tools
    - Backing Plates

    Associated Links:
    - Request For Quote Form



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    PO Box 2299
    Daytona Beach, FL 32115

    Tel: (386) 238-7017 | Fax: (386) 238-0976

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