MAT-VAC Technology, Inc.

MRC Type Target Backing Plate Configurations


TARGET DIAMETER MATERIAL OEM Equivalent PART NUMBER  
Inches (mm)

Round Type A ("O" Ring Sealed)
*1 (25.4) Stainless Steel 808-17-200
*2 (50.8) Stainless Steel 808-18-200
*3 (76.2) Stainless Steel 808-19-200
*4 (101.6) Stainless Steel 808-20-200
5 (127.0) Stainless Steel 808-03-005
6 (152.4) Stainless Steel 808-03-006
6 (152.4) Copper 808-25-006
6.5 (165.1) Copper 828-06-100
8 (203.2) Copper 828-25-003

Internally Water Cooled
8 (203.2) Stainless Steel 808-26-100
10 (254.0) Stainless Steel 808-68-100
12 (304.8) Stainless Steel 808-63-100
14 (355.6) Stainless Steel 808-89-100
15 (381.0) Stainless Steel 808-71-100
16 (406.4) Stainless Steel 808-90-100

Round Type B (No Water to Vacuum Seals)
*1 (25.4) Stainless Steel 828-07-100
*2 (50.8) Stainless Steel 828-08-100
*3 (76.2) Stainless Steel 828-09-100
*4 (101.6) Stainless Steel 828-10-100
5 (127.0) Stainless Steel 808-87-100
6 (152.4) Stainless Steel 808-88-100
8 (203.2) Stainless Steel 808-60-100
10 (254.0) Stainless Steel 808-69-100
12 (304.8) Stainless Steel 808-67-100
14 (355.6) Stainless Steel 808-94-100
15 (381.0) Stainless Steel 808-72-100
16 (406.4) Stainless Steel 808-93-100

MRC 900/600 Rectangular Type B
(No Water to Vacuum Seals)
 
Planar Copper 899-00-382
INSET®1   Copper 828-36-100
Mag. Matls. Planar   Copper 869-06-002
*  Note: Target Diameters of 1" thru 4" have 5" O.D., reduced in center to appropriate target diameter.
1. Note: INSET ® is a registered trademark of Praxair Corp.

Assorted Target Backing Plates

PVD Systems Related:
- Replacement Parts
- Sputtering Cathodes
- Specialized Tools
- Backing Plates
- eBay Store / Overstock

Associated Links:
- MRC Type Target Backing Plates
- Reverse Engineering Services
- Request For Quote Form



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PO Box 2299
Daytona Beach, FL 32115

Tel: (386) 238-7017 | Fax: (386) 238-0976

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