MAT-VAC Universal Sputterer™ System Modernization Kits

In response to numerous customer requests, MAT-VAC has decided to offer its new Universal Sputterer™ system modernization technology in the form of a Do It Yourself (DIY) kits for existing MRC (KDF) 900/600 series RF/DC in line load lock sputtering systems.

Given the current slowness in the economy and possible equipment under utilization, now is the perfect time to put your PVD techs to productive use re-tooling your obsolete MRC (KDF) in line PVD equipment. When factory utilization increases, you will have modern sputtering equipment in place to meet the increased demand for thin film production.

These DIY system modernization kits are an industry first and are only made possible because of MAT-VAC's Panel-Fab™ modular engineering design approach.

MAT-VAC's new PVD sputtering systems design makes extensive use of modular 19" rack mount panel assemblies to mount important electrical/electronic and mechanical sub-assemblies both externally on the main system frame & electronic control rack and internally within the system chassis. We refer to this innovative new modular engineering design approach as Panel-Fab™. Panel-Fab™ modular construction decreases Mean Time To Repair (MTTR) as sub-assemblies are easily detachable as complete units and can be replaced in 5 minutes time or less. Complete ready to ship spare sub-assemblies are available from MAT-VAC stock and can also be stocked locally at the customer's site.

Since the kits are designed to upgrade an already existing MRC (KDF) 900/600 series RF/DC in line load lock sputtering system, it should be possible if necessary to justify the cost of these kits to existing maintenance vs. capital equipment budgets.

Ordering Information: Description Part Number 94X Modernization Kit Applies to MRC (KDF) 942/943 KITUS94X 90X Modernization Kit Applies to MRC (KDF) 902/903 KITUS90X 64X Modernization Kit Applies to MRC (KDF) 643 KITUS64X 60X Modernization Kit Applies to MRC (KDF) 603 KITUS60X

The MAT-VAC modernization kit will typically pay for itself in 1 year or less AND you no longer will be investing valuable funds in obsolete MRC parts purchases with related ever increasing costs associated with excessive equipment maintenance and non-productive downtime.

In these difficult economic times, we recognize the need for customers to extend the life of their MRC (KDF) type sputtering tools as much as possible because not every company can afford the expense of purchasing a modern newly designed MAT-VAC Universal Sputterer™ or even more so, the leading competitor's in line sputtering system.

Furthermore, customers located in a European Community (EC) member country can possibly upgrade their existing MRC (KDF) type in line sputtering system without the stringent CE Mark requirements, since their original MRC (KDF) 900/600 series RF/DC in line load lock sputtering equipment has already been accepted "Grand fathered" into their respective EC country. We can refer you to EC based vendors of remanufactured Advanced Energy DC and RF power supplies which are already "Grand fathered" in to the EC should you be in need of these "Prerequisite" items.

One (1) week of MAT-VAC factory training for two (2) customer technicians/engineers on the Universal Sputterer™ system operation, maintenance, and kit installation is included in the price of the kit. In addition, customer personnel will be able to check out the proper functioning of the actual kit items that will be shipped for their order. Customer personnel are responsible for all travel and living expenses.

MAT-VAC's Remote Access Software Support (RASP) diagnostic software allows the factory experts to assist customer personnel with system start up/initialization.

Documentation is embedded in the PC software as well as furnished in hard copy manuals.

Most of the kit items can be shipped in multiple small boxes, so shipping costs should be minimal.

• Existing original MRC or KDF 900/600 series RF/DC in line load lock sputtering system with all of its mechanisms present
• Technically proficient sputtering equipment personnel. All kit items will be installed in a MAT-VAC test system and checked out by customer personnel during the MAT-VAC factory training.
• Items not included in the kit, but required to be furnished by the customer for kit installation at customer location include:
  • CTI 8 cryo pump(s) equipped with diode sensor for remote cryo temperature read out
  • CTI cryo pump cryo compressor(s) and He cryo lines
  • Mechanical vacuum roughing pump
  • Advanced Energy MDX 5 or 10 solid state DC Magnetron sputtering power supply or modern Advanced Energy equivalent (if system is to be utilized for DC Mag. sputtering)
  • Advanced energy RFG 1250 or 3000 solid state RF power supplies or modern Advanced Energy equivalent (if system is to be utilized for RF sputtering/etch)
  • Gate valve(s) and throttle valve
  • MKS gas delivery system with MKS 250, 247 gas controllers, MKS Baratron, and mass flow controller(s)
  • Granville Philips model 307 ionization gauge controller with set point module
  • MRC type cathode assemblies
  • RF power flex transmission lines and target boxes
  • Hydraulic system
  • Interlock switches (vacuum, covers/panels)
  • I.R. Quartz Heat Lamp Assembly (Optional)

• Universal Sputterer™ automatic control rack/tower with Universal Sputterer™ software, GE Fanuc 90-30 series PLC, Dell PC/monitor, Diagnostic Maintenance Panel (DMP), circuit breaker box, cabling to vacuum system chassis, panel for cryo pump compressor(s) and mechanical pump AC power cords plug in
• Optical encoder for pallet carrier positioning
• Optical encoder for shutter positioning (903/902/603)
• Chassis In/Out Panel (CIOP) with all internal vacuum system chassis wiring including optical interrupter switches for the control of load lock elevator and RF etch platform positioning.
• Emergency Off EMO panel with optional Watlow PID Heat Controller and RF Meters
• MAT-VAC redesigned automatic RF power matching network with solid state switching relays,
• Automatic RF matching network controller
• MAT-VAC front system indicator panel with LED indicators for load lock elevator, RF etch table position status
• Utility panel with Proteus water flow switches
• Pneumatic valves panel with associated wiring interconnect panel
• Utility panel for vent and cryo purge gases
• Pallet carrier scan motor with associated controllers and zero switch electrical vacuum feed through
• 24 VDC hydraulic valves (V1, V2, and V18).
• Polyflow tubing with "quick disconnect" fittings
• New roughing valve and line with QF "quick disconnect" flanges
• Cryo pump regeneration temperature/pressure panel(s)

These industry first MAT-VAC Do It Yourself (DIY) modernization kits allow customers with obsolete MRC type in line sputtering systems with an economical way to bring their existing sputtering system(s) to current levels of technical sophistication and industry reliability/safety standards.

MAT-VAC reserves the right to restrict the sale of its Universal Sputterer™ Modernization Kits to end user companies.