Backing Plates

Our selection of Copper and Stainless Steel, circular and rectangular replacement backing plates is one of the largest in the industry. Backing plates are available to fit almost every model of OEM sputtering system ever manufactured. Both standard and custom backing plates are available. Please contact us with your requirement(s).

Popular OEM Style Backing Plates

Perkin Elmer Equivalent Backing Plates:

6" Dia. RF Copper - OEM Ref. Part # 720-059-000
8" Dia. RF Copper - OEM Ref. Part # 221-190-600
8" Dia. DC Magnetron - OEM Ref. Part # 221-249-400
Delta Bond-On & Bolt-On - OEM Ref. Part # 221-313-100

MRC Equivalent Backing Plates:

6" Dia. Copper Type A - OEM Ref. Part # 808-25-006
6" Dia. Stainless Steel Type A - OEM Ref. Part # 808-03-006
8" Dia. Stainless Steel Type A - OEM Ref. Part # 808-26-100
8" Dia. Stainless Steel Type B - OEM Ref. Part # 808-60-100
6.5" Dia. Copper Magnetron - OEM Ref. Part # 828-06-100
8" Dia. Copper Magnetron - OEM Ref. Part # 828-25-003
900/600 Series Copper Planar - OEM Ref. Part # 899-00-382
INSET® Copper Brazement¹ - OEM Ref. Part # 828-36-100

CVC Equivalent Backing Plates:

8" Dia. Copper with 0.250" O.D. Cooling Tubes - OEM Ref. Part # 283989
8" Dia. Copper with 0.375" O.D. Cooling Tubes - OEM Ref. Part # 294601

1. INSET® is a registered trademark of Praxair Corp.

Assorted Target Backing Plates

PVD Systems Related:
- Replacement Parts
- Sputtering Cathodes
- Specialized Tools
- Backing Plates

Associated Links:
- MRC Type Target Backing Plates
- Reverse Engineering Services
- Request For Quote Form

MAT-VAC Technology, Inc.
PO Box 2299
Daytona Beach, FL 32115

Tel: (386) 238-7017 | Fax: (386) 238-0976

Contact Us | Request a Quotation