Welcome to the NEW Price Performance Leader
of In Line Load Lock Batch Sputtering Systems
and Thin Film Technology
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Substrate Loading Capabilities | ||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Wafer Diameter Sizes | Substrate / Panel Sizes | ||||||||||||
| 2" (50mm) |
3" (75mm) |
4" (100mm) |
5" (125mm) |
6" (150mm) |
8" (200mm) |
12" (300mm) |
1" x 1" | 2" x 2" | 4" x 4" | 6" x 6" | 12" x 12" | Total Area 144in2 (0.092903m2) |
|
| MVT-900 SERIES | 36 | 16 | 9 | 5 | 4 | 1 | 1 | 144 | 36 | 9 | 4 | 1 | 1 | MVT-600 SERIES | 36 | 16 | 9 | 5 | 4 | 1 | 1 | 144 | 36 | 9 | 4 | 1 | 1 |
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Copyright © 2001-2008 - MAT-VAC Technology, Inc. All Rights Reserved.
Copyright © 2001-2008 - MAT-VAC Technology, Inc. All Rights Reserved.