Welcome to the NEW Price Performance Leader
of In Line Load Lock Batch Sputtering Systems
and Thin Film Technology
Our customer: Gil F. writes:
|
The film quality from the tool has been very good! the uniformity for and 8 inch wafer is better than +-5%. When we wet etch a .4um film the wafer begins to clear at the edge in about 6 minutes and is totally clear by 6 minutes 20 sec. This is a good indication of uniformity.
... The Aluminum films are very smooth and etch to give very smooth lines. We are making features that are about 5 um wide and the features look very nice. I will send you some micrograph photos you can use any way you please. The TiN films are working out very well for us. This is a big help to our processing capability. We get consistant gold TiN films on Ti. ... The three target system has been a tremendous help to our process. The metal stack we are using has allowed us to reduce our contact resistance by a factor of 3 to 4 and has tremendously improved the tightness of the in-wafer spread of resistance and the wafer to wafer repeatablility. ... In general the tool had operated very well. The software is very user friendly to operate and recipes are easy to write. Also if there is a hicup in the operation, (plasma doesn't light or etch swr too high) the software allows one to conveniently recover and continue the process in many cases by temporarily deleting steps from the recipe and running. I have found my interactions with Matvac very helpful and pleasant. Your company has helped our company out a great deal by providing us with this fine tool and helpful advise! Your years of experience in the business have been of great value in our relationship. |
In a follow up email dated: Thursday, February 08, 2007 9:43 PM
he adds:
|
Hi Joe, Here are some micrographs of a patterned aluminum layer 0.4 um thick. They are not too exciting but they do show how smooth the layer is and how well it patterns with wet etching. ... The units on the reticles are in microns. In the picture "etched Al 3 100x" the spaces between the pads are about 2 microns. The Nomarsky photo shows how smooth the film is. No hillocks or bumps of any kind. Thanks Gill
|
In an email dated: Tuesday, February 06, 2007 02:07 PM
Our customer: Robert L. writes:
| ... both of our MVT-603 machines were giving us better sheet resistance uniformity from the Tantalum target compared to any of the other machines. |
In an email dated: Tuesday, February 06, 2007 11:52 AM
Our customer: Matt S. writes:
| The Mat-Vac tool does a MUCH better job with adhesion between our metal and the target glass than the former supplier's machine. I cannot say anything more than that, but this Mat-Vac attribute is very valuable to F______. |
In an email dated: Monday, February 05, 2007 3:36 PMOur customer: Cicely B. writes:
| The machine is running about 98% up time. |
Customer Reference Letter
Our customer: Dennis Costa writes:
| I comfirm that I have dealt with MAT-VAC Technology, since 2003, during which time they have provided my business with excellent support and service in the area of Plasma Sputtering systems. Their work has been a major factor in our sputtering systems success, helping it to become one of our most reliable processes. I can confidently recommend MAT-VAC Technology as a solid reliable supplier, and experts in their field. Yours Faithfully Dennis Costa Engineering Technician/Medical Products Morgan Advanced Ceramics, Inc. Alberox Division |
(Mr. Costa is a MAT-VAC Universal Sputterer™ MVT-943 Sputtering System Customer of unit S/N US 502 shown here installed on at their site:)Customer Press Release
Our customer: Mark M. announces (in part):
| ... we are delighted that the first production run using our new toolset (a pair of MVT- 600 Series) yielded a higher than expected percentrage of excellent thin-film batteries. |
Customer Staff Receive Training
on Their New MVT-943 Universal Sputterer™
Last Revision: 11-Jan-2007
The class in front of their new MVT-943 "Universal Sputterer™" system.
"I feel that the machine was put together with a lot of time and thinking. It will be easy to work on and maintain.
The training was good and answered all of our questions."
John
"MAT_VAC and Mark Lambert have done an extremely good job with the documentation and the CD portions of this program. It seems to be very user friendly.
The only think I might suggest about improvements to the machine might be to change from the Analog Cryo controller & Indicator to maybe a(n) onboard CTI controller that can run the cryo regneration seperate from the PLC.
Thanks for the opportunity to learn about the MAT-VAC new maching and do look forward to working on it."
Rick G.
"MAT-VAC is an efficient small company.
In my mind:
— Strength:
- in interface of hardware and software
- Database organization
- refurbish machines with limited time
- good cooperation with customer
- very friendly
MJ
"The course was magnificent. Mark gave very detailed and in-depth analysis of the system and all of it's functions. I would recommend to any employer that they send their tech's through the course.
Good Job!"
Carl P.
"MAT-VAC provided a very good training class. Very impressive complete manuals. And the CD-ROMs point & Click features are going to make troubleshooting much easier. The GUI is very self explanitory and ties in well with the machine as a whole.
I love the way the remanufacture has been done. It looks and will run like a brand new machine.
The PLC control is a sonderful jump from the original as far as reliability and troubleshooting.
I can tell this remanufacture has been well thought out & meticulosly designed. Training was informative and flexible. All around very good class & machine."
Mike R.
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