Welcome to the NEW Price Performance Leader
of In Line Load Lock Batch Sputtering Systems
and Thin Film Technology
MAT-VAC PLC/GUI Based
Universal Sputterer™ Automation and Control System
Universal Sputterer™ Automation and Control System
The MAT-VAC sputtering system automation and control system is a dramatic advancement in sputtering system control. The control of the system is done in two parts, the autonomous control of the machine itself and the top level recipe sequencing.
The autonomous control is performed by the GE Fanuc PLC. This PLC is responsible for the safe operations and direct control of the machine. All of the interlocks and safeties and other operational details are handled by the PLC.
The PLC also directly interfaces with the diagnostic maintenance panel where the machine technician can manually control the various system components, valves, pumps, motion systems, etc.
The top level recipe sequencing, management and diagnostic control of the system is performed by a Windows based PC running a GUI (Graphical User Interface) for recipe and system management. Calibration and configuration parameters are set and controlled by this GUI program. Target parameters and related factors are also controlled at this level. The GUI program interfaces directly to the PLC and is used to trigger embedded sequences for performing specific types of operation. Having set the operational parameters for, say, scanning, the PLC is then responsible for the action motions of the system. This allows the GUI to monitor the PLC operation and allows the freedom for the PLC to self execute long scanning sequences with no GUI intervention.
The autonomous control is performed by the GE Fanuc PLC. This PLC is responsible for the safe operations and direct control of the machine. All of the interlocks and safeties and other operational details are handled by the PLC.
The PLC also directly interfaces with the diagnostic maintenance panel where the machine technician can manually control the various system components, valves, pumps, motion systems, etc.
The top level recipe sequencing, management and diagnostic control of the system is performed by a Windows based PC running a GUI (Graphical User Interface) for recipe and system management. Calibration and configuration parameters are set and controlled by this GUI program. Target parameters and related factors are also controlled at this level. The GUI program interfaces directly to the PLC and is used to trigger embedded sequences for performing specific types of operation. Having set the operational parameters for, say, scanning, the PLC is then responsible for the action motions of the system. This allows the GUI to monitor the PLC operation and allows the freedom for the PLC to self execute long scanning sequences with no GUI intervention.
Your existing MRC 900/600 Series Batch Sputtering System process recipies and most, if not all, other newly manufactured OEM batch sputtering system recipes, can be inputted into the new MAT-VAC PLC based Universal Sputterer™ Automation and Control system. This new MAT-VAC automation system is a vast improvement over competing designs. It offers many unique software and hardware Advanced Features not available from other higher priced PVD batch sputtering system manufacturers.
MAT-VAC's innovative state-of-the-art Universal Sputterer PLC GUI design allows MAT-VAC the capability to download software updates, revisions, fixes and diagnose software/hardware problems over a secure, virus protected, high speed internet connection from its Florida, USA based headquarters location or any other location. This new feature is called, Remote Access Support Program (RASP). Now, no matter where in the world you are located, MAT-VAC can assist you without the cost of an on-site field service visit. Learn more.
The documentation for the system is web centric and all of the operational manuals are directly online in an embedded window on the main page of the GUI program.
The documentation is divided into two sections. The web based operations manual that describes in detail all of the controls and features of the software and the Adobe Acrobat based (.PDF) engineering notebook.
The inclusion of the engineering notebook is a rarity in the sputtering industry. The engineering notebook consists of literally hundreds of pages of documentation, drawings, illustrations, component specifications and equipment manuals all consolidated into a single, index and linked Adobe Acrobat (.PDF) document. This allows your in-house staff to diagnose and maintain the systems with ease. Complete wiring and cabling information allows rapid maintenance of your systems without the need for an expensive service call.
All of the manuals and related materials are supplied with the system on CD-ROM.
Software support is available from both MAT-VAC and GE Fanuc. Hardware items after the expiration of the MAT-VAC warranty can be purchased directly from GE, or if the customer prefers, from MAT-VAC.
Regardless of your particular requirement, MAT-VAC will strive to serve you.
Please contact MAT-VAC with any questions you may have concerning our capabilities.
Request a Quotation:
The documentation for the system is web centric and all of the operational manuals are directly online in an embedded window on the main page of the GUI program.
The documentation is divided into two sections. The web based operations manual that describes in detail all of the controls and features of the software and the Adobe Acrobat based (.PDF) engineering notebook.
The inclusion of the engineering notebook is a rarity in the sputtering industry. The engineering notebook consists of literally hundreds of pages of documentation, drawings, illustrations, component specifications and equipment manuals all consolidated into a single, index and linked Adobe Acrobat (.PDF) document. This allows your in-house staff to diagnose and maintain the systems with ease. Complete wiring and cabling information allows rapid maintenance of your systems without the need for an expensive service call.
All of the manuals and related materials are supplied with the system on CD-ROM.
Software support is available from both MAT-VAC and GE Fanuc. Hardware items after the expiration of the MAT-VAC warranty can be purchased directly from GE, or if the customer prefers, from MAT-VAC.
Please contact MAT-VAC with any questions you may have concerning our capabilities.
Request a Quotation:
- To request a quotation on one of MAT-VAC's Thin Film Systems, please fill out our request for quote form by clicking here.
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Copyright © 2001-2008 - MAT-VAC Technology, Inc. All Rights Reserved.