Welcome to the NEW Price Performance Leader
of In Line Load Lock Batch Sputtering Systems
and Thin Film Technology
The NEW 1
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These are not a simple "band aid" upgrades; rather this is a total machine modernization. We start with a MRC 900/600 chassis, and then virtually every major sub-assembly and component is replaced beyond the physical chassis and chamber. Even those items are carefully cleaned, inspected, repaired and upgraded to "like new" standards. The level or mix of brand new vs remanufactured components or 100% completely new is dependent upon the customer's budget, but regardless MAT-VAC backs these systems with a new 1 year limited warranty on all new parts.
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The existing pneumatic actuators and primitive control logic systems are completely stripped and discarded. In their place we install an industrial strength GE Fanuc Series 90™ PLC control system interfaced to a state of the art Windows™ based GUI program.
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Screen displays are representative and may vary in the final production systems
Not only does this program present a clean and intuitive interface to the system, it also allows for sophisticated "recipes" to be developed and stored. These allow you to specifically tailor the operation of the system to optimize production and reduce downtime.
There is no limit on the number of steps in a process recipe and all pertinent process parameters are at your fingertips and easy to input and/or modify. Advanced Features include auto-time calculations where the total step time and scan times are automatically computed based on the carriage speed and number of repetitions you select.
RF and DC sputtering modes are selectable on all targets, any mix of up to four gasses can be selected, in-process heat time is programmable up to an hour, power levels and the substrate carrier scan speed are all settable. Single, multi-pass and 1/2 scan for substrate scanning capabilities are included as standard features.
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The new software also has extensive customization and calibration features built in to allow you to tailor the screens to reflect your selection of gasses, targets, power levels and safety thresholds.
Interactive indicators show the set points and actual readings, as well as the independently settable power tolerances. The calibration settings are stored with the recipes to insure that all process parameters are controlled and correct as you change recipes. Calibration changes are automatically detected and the update indicator enables only when some process parameter has been modified. This allows the operator to verify at a glance that the presets are unmodified.
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Mechanically the systems are completely stripped down to the basic chassis and chamber. The chamber and load lock are cleaned, inspected and rebuilt to exacting standards to insure years of continued reliable production (does not apply to 100% completely new manufacture).
All major subsystems are replaced with modern equipment. This adds years to the maintenance lifetime of the systems by insuring a source of replacement parts that are not in "end of production" status. Externally the panels and sheet metal are all stripped, repainted, and relabeled to reflect both the new features of the system and to insure long-term readability of the controls and indicators. Modern instrumentation is used to assure precise control of all process parameters and to give tight closed loop microprocessor based control over your production processes.
Since standard "off the shelf" GE Fanuc™ PLC modules and PC components are employed in the automated system, replacement parts are readily available, and you are not "locked in" to purchasing custom software and hardware components at exorbitant prices. Maintenance is simplified and uptime increased as you can stock spare modules without ordering delays. Comprehensive documentation on CD-ROM and no "copy protected" software complete the package – allowing timely maintenance and upgrade of the system host computer at any time.
While the modernization and upgrading process takes place at the MAT-VAC facility, our trade-up/exchange program allows you to trade-in your old MRC 900/600 series sputtering system and upgrade to a newly manufactured MAT-VAC Universal Sputterer™ MVT-900/MVT-600 Series in-Line Load Locksputtering system without bringing your production line down. This "trade-up" program keeps your production line running until we deliver our systems and take your old one in as a trade.
A "network ready" PC and a flat LCD display are supplied with each system and can be upgraded to a flat touch-screen LCD display as an option. Extensive built in test and diagnostics include a web compatible "twinkle board" display for real-time remote monitoring of multiple production systems.
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So, whether your needs are for a flexible, programmable
system for R&D and pilot plant, or for consistent high volume thin film
production, the MAT-VAC Universal Sputterer™ MVT-900/MVT-600 Series Sputtering Systems are the thin film sputtering
systems for today and the future. Because of these special new MAT-VAC product
offerings and our trade-up/exchange program, you can move to the latest "state of the art" Graphical User Interface (GUI), based on a proven in-line load
lock batch sputtering system platform, all for a fraction of the cost of the leading competitor's new system. Invest in a MAT-VAC Universal Sputterer™ MVT-900/MVT-600 series modernization upgrade or
completely 100% new sputtering system now and reap years of trouble free operation and
volume production. It makes good sense to go with MAT-VAC's products from both
an economic and operational standpoint. In today's very competitive business environment, why pay more than you absolutely have to?
Please contact MAT-VAC with any questions you may have concerning our capabilities.
1. "New" systems may contain some recycled content.
Note: Does not apply to 100% new MAT-VAC MVT-900/MVT-600 Series Sputtering Systems.
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Copyright © 2001-2008 - MAT-VAC Technology, Inc. All Rights Reserved.
Copyright © 2001-2008 - MAT-VAC Technology, Inc. All Rights Reserved.