The NEW 1 and Innovative
MAT-VAC Universal Sputterer™
MVT-900/MVT-600 Series
in-Line Load Lock
Batch Sputtering Systems


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With the introduction of its innovative MAT-VAC Universal Sputterer™ MVT-900/MVT-600 series in-line load lock batch sputtering system product line, MAT-VAC Technology, Inc. has catapulted to the forefront of fully automated batch sputtering system design technology. Based on the proven MRC 900/600 Series in Line Load Lock Batch Sputtering System designs, MAT-VAC has designed an innovative new sputtering system family with a common modular control automation platform, the Universal Sputterer™ that completely automates all operator interface and maintenance/troubleshooting routines. MAT-VAC has already modernized, upgraded, & completely automated many MRC 900/600 series with its new, innovative, Universal Sputterer™ technology. Move up to the most advanced and sophisticated sputtering systems on the market today! Go with MAT-VAC... the NEW Price/Performance Leader.

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Advanced Features:

  • Simplified mechanical design for high reliability and ease of maintenance
  • Simplified valve design — Pneumatics centrally located on manifold for no-tools valve swap — Simplified wiring with only air lines running to vacuum valves
  • Automatic unattended cryo pump regeneration
  • Simple recipe programming
  • Secure Operator, Supervisory, & Maintenance modes with key switch lockout
  • Modular Design for faster, easier troubleshooting and maintenance. Designed for serviceability and maximum tool reliability/uptime
  • Quick disconnect water and air fittings require no tools and replace the time-consuming and expensive ferrule type fittings of the past
  • New "clamp on" RF/DC planar magnetron target designs
  • LED's replace the shutter & pallet carrier mechanical position indicators of the MRC designs.

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Advanced Optical Encoder Benefits:

  • Few moving parts — literally hundreds of moving components eliminated — No switches except zero and over-scan limit. External shutter and pallet carrier drive trains & switches have been completely eliminated resulting in a major reliability improvement over the MRC designs.
  • High resolution (.007"/step over full travel range)
  • Auto Zero — simple recalibration
  • Retentive position over power down equals no position memory loss
  • Smoother motion (auto-slow) for precise pallet carrier motion control during acceleration/deceleration.
  • Automatically realigns pallet during outfeed pallet exchange — eliminates pallet crashes during normal cycling.
  • More accurate pallet handling, electronic "switch" positions allow finer motion control.
  • No clutches to wear out.
  • No-hunting on carrier speed gives smooth motion without periodic variations — highly uniform deposition.

External Electronics Rack Benefits:

  • Separate 'roll-around' 19" electronic control rack insures EMI/RFI sensitive electronics are kept safely away from high voltage power supplies.
  • Modular design — completely severable from chassis w/o tools
  • Consolidation and elimination of all obsolete control electronics creates less congestion — "Open" main vacuum system lower chassis for ease of maintenance.
  • No risk of electrical shorting due to the separate control rack from the main vacuum system.
  • Diagnostic Maintenance Panel allows manual control of valves and motion systems. Multi-function indicators and "amplified" functions using Good-To-Go (GTG) button. Includes built in Digital Panel Meter for monitoring of critical analog I/O's.

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GE Fanuc PLC Benefits:
  • Rugged industrial tested modular design with world-wide independent spares and technical support available directly from GE Fanuc.
  • Hot-swappable.
  • Self diagnostics ensure reliable operation.
  • Battery and EPROM backup standard for ladder logic.
  • Visible LED indicators for all inputs, outputs and module status.
MRC PLC
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Windows GUI Benefits:
  • "Standard" PC — available anywhere
  • Standard Microsoft platform and software: Compiled Visual Basic
  • Simple programming with unlimited steps in recipe. 100% compatibility with MRC/other sputtering system OEM process recipes and routines.
  • Touch screen LCD available (optional).
  • Intuitive interface. Color coded for easier, intuitive, operation. Fewer operator errors.
  • Networkable design allows monitoring of multiple systems from a single web browser.
  • Integrated Browser allows tie in to client web based production control systems.
  • Integrated online documentation
  • Fully automated operation as simple as 1-2-3:
    1. o — Insert pallet, hold Load Lock closed
    2. o — Press GTG button until Rough Valve opens
    3. o — Click "Cook" button on GUI

  • Pump down/heat/sputter/cool/exchange all unattended — Valves operate automatically conserving N2 and vacuum — Load Lock opens automatically at end of process ready for next pallet

Cost Effectiveness/Economic Benefits:

  • MAT-VAC MVT-900/MVT-600 Batch Universal Sputterer™ Sputtering Systems all come with a one-year MAT-VAC limited warranty on new parts.
  • MAT-VAC MVT-900/MVT-600's Batch Universal Sputterer™ Sputtering Systems are very competitively priced when compared to new or rebuilt 900/600 sputtering systems from other manufacturers.
  • Trade-up/Exchange Program: MAT-VAC's "swap out" program combined with MAT-VAC's liberal trade in policy allows the customer to retain the use of their existing MRC/other in-line OEM Sputtering System until the new MAT-VAC MVT-900/MVT-600 is delivered and installed — This results in no downtime to the customer's existing thin film sputter production.

Another major financial consideration is that by retaining your fully depreciated and obsolete MRC sputtering system, your company is not benefiting financially from being able to depreciate this asset.

By purchasing a NEW MAT-VAC tool (verses used/rebuilt) or Trading-In / Exchanging your existing, obsolete and fully depreciated MRC 900/600 Series tool for a NEW MAT-VAC MVT-900 / MVT-600 Series Sputtering System, your company can restart the depreciation cycle all over again AND own the most modern, advanced in line batch sputtering tool in the process.

Be sure to discuss this depreciation benefit with your company President or CFO/Comptroller.

Another of the many reasons why it PAYS to go with MAT-VAC... the NEW Price Performance Leader in the sputtering equipment industry.

Can't afford the capital outlay right now? No problem, once again MAT-VAC has an innovative solution! We are now able to assist our customers finance the acquisition of a NEW MAT-VAC Sputtering System. In order to determine the maximum lease amount that your company can be qualified for, apply here.

For a sample of equipment lease rate factors, click here.

A major advantage of an Equipment Lease with a "buy out" provision at the expiration of the lease term, is that you can apply the monthly lease payment amount to your operating expenses.

Before being able to conclude an Equipment Lease for a MAT-VAC sputtering system, you will need to determine the exact MAT-VAC sputtering system configuration and cost. To request a quotation on a MAT-VAC sputtering system, click here.

MAT-VAC Technology, Inc., an established thin film technology equipment & materials company (since 1993), uses advanced engineering management tools and automation for configuration control. CAD drawings and advanced wiring management tools allow wire-by-wire tracking for each specific machine configuration.

MAT-VAC design engineers possess many years of aerospace industry experience and utilize this experience to produce aerospace industry quality products and documentation.

Every MAT-VAC system is designed to allow for the subsequent easy field retrofit of standard optional items/accessories. The "Universal Sputterer™" software allows the same software to be used in all machine configurations and permits dynamic reconfiguration in the field without specialized equipment or cables.

Online parts and assembly database allow precise configuration control and spares management.

Only the "very best" UL Certified and CE Mark approved OEM assemblies & components are integrated into MAT-VAC's sputtering system designs.

MAT-VAC's highly skilled and dedicated technical staff have many years of combined thin film coatings process technology and sputtering/PVD system design, industrial process control automation, engineering, and aerospace manufacturing experience and expertise. It makes sense to put the "very best team" on your new sputtering system purchase.
1. "New" systems may contain some recycled content.
Note: Does not apply to 100% new MAT-VAC MVT-900/MVT-600 Series Sputtering Systems.