MAT-VAC Technology, Inc.

Pure Metals

MATERIAL FORMULA STANDARD
PURITIES, %
THEORETICAL
DENSITY, g/cm3
MELTING
POINT, oC
FABRICATION
METHOD
   APPLICATIONS
Aluminum Al 99.999
99.99
2.70 660 1    Conductive film in IC's. High reflectivity front surface mirrors and reflectors on glass. In oxidized form, interference filters.
Antimony Sb 99.999
99.5
6.62 630.5 1 & 2    Semiconducting films.
Bismuth Bi 99.999
99.5
9.80 271.3 1 & 2    Ferromagnetic and resistive thin films.
Boron B 99.5
90-92, 94-96
2.34 2030 2    Semiconductor. Diffusion layer.
Cadmium Cd 99.999
99.5
8.65 320.9 1 & 2    Dielectric thin film. For metallizing paper, etc.
Chromium Cr 99.95
99.8+
7.19 1875 1,2 & 3    Excellent adhering film on numerous substrates. Deposit on glass for printed circuit base. Co-deposit with SiO for resistor films.
Cobalt Co 99.9 8.90 1495 1 & 2    Ferromagnetic thin films.
Copper Cu 99.999
99.99
8.96 1083 1    Junction films in integrated circuits. Contacts.
Germanium Ge 99.9999
99.999
5.32 937.4 1    High index film in infrared filters.
Gold Au 99.999
99.99
19.30 1063 1    Contacts. Highly reflecting films.
Graphite C 99.9
99.5
2.26 3727 2    Lubricant film. Semiconductor applications.
Hafnium Hf 99.9
(excl. Zr)
13.10 2222 1    Dielectric. Interference layers.
Indium In 99.999
99.99
7.31 156.2 1    Superconducting films. Transistor contacts, diodes.
Iron Fe 99.9 7.86 1536 1 & 2    Magnetic and memory elements. Ferromagnetic thin films.
Lead Pb 99.999 11.40 327.4 1    Semiconducting films. Cyrogenic applications.
Magnesium Mg 99.99
99.9
1.74 651 1    Diffusion with bismuth on glass to form ferromagnetic films.
Manganese Mn 99.95 7.43 1245 2    Contacts for semiconductors. Adherence film.
Molybdenum Mo 99.95 10.20 2610 2    Contacts. Hard, smooth film. Multilayer circuits.
Nickel Ni 99.995, 99.99
99.97, 99.9
8.90 1453 1 & 2    Ferromagnetic films. Memory elements.
Niobium Nb 99.9+ 8.40 2468 1    Anodic films for rectification.
Palladium Pd 99.95
99.9
12.00 1552 1 & 2    Corrosion resistant contacts.
Platinum Pt 99.95
99.9
21.45 1769 1    Corrosion resistant contacts. Co-deposit with Si.
Rare Earth 99.9
(excl. Ta)
varies varies 1    Misc. applications.
Rhenium Re 99.99 20.53 3180 2    Contacts.
Ruthenium Ru 99.9 12.20 2500 2    Corrosion resistant contacts.
Selenium Se 99.999 4.50 220 1    Photoconductive and rectifier films.
Silicon Si 99.999 2.33 1410 1    Mechanical and chemical resistant coating. Interference filter.
Silver Ag 99.99 10.50 960.8 1    Reflective film. Conductive contact. Bonding layer.
Tantalum Ta 99.95 16.60 2996 1    Thin film capacitor and resistors.
Tellurium Te 99.99, 99.95
99.5
6.25 452 2    Blocking contact in thin film devices.
Tin Sn 99.999 7.30 231.9 1    Cyrogenic switching devices.
Titanium Ti 99.9 4.51 1668 1    Deposited film oxidized to TiO2 as beam splitter or insulator.
Tungsten W 99.95 19.30 3410 2    Contacts. Hard, adherent films.
Vanadium V 99.5-99.7 5.96 1900 1 & 2    Co-evaporate with SiO for resistor films.
Zinc Zn 99.999
99.9
7.14 419.5 1    Capacitor dielectric films. For metalizing paper, etc.
Zirconium Zr 99.9
(excl. Hf)
6.49 1852 1    Interference filter. On tungsten field emitters to alter emission characteristics.

* Fabrication Method: (1) Vacuum or air-vacuum melted, then rolled, cut and machined as required. (2) Hot-pressed or fabricated through special press-sinter process. (3) Vacuum hot-pressed or forged.

High Purity Sputtering Targets

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