EVAPORATION
MATERIAL |
TEMPERATURE (ºC)
@ VAP. PRESSURE |
EVAPORATION TECHNIQUES |
REMARKS
n = Index
of Refraction |
10-8
TORR |
10-6
TORR |
10-4
TORR |
ELECTRON
BEAM |
CRUCIBLE |
COIL |
BOAT |
 |
|
Sulphur (S8) |
13 |
19 |
57 |
Poor |
Quartz |
— |
W |
Poisons vacuum system. |
|
|
Supermalloy (Ni/Fe/Mo) |
— |
— |
— |
Good |
— |
— |
— |
Sputtering preferred; or co-evaporate from 2 sources, Permalloy and Mo. |
|
|
Tantalum (Ta) |
1960 |
2240 |
2590 |
Excel. |
— |
— |
— |
Forms good films. |
|
Tantalum
Carbide (TaC) |
— |
— |
-2500 |
— |
— |
— |
— |
JVST 12, 811 (1975) |
|
Tantalum
Nitride (TaN) |
— |
— |
— |
— |
— |
— |
— |
Reactive; evaporate Ta in 10-3 N2. |
|
Tantalum
Pentoxide (Ta2O5) |
1550 |
1780 |
1920 |
Good |
Vit. Carbon |
W |
Ta |
Slight decomposition; evaporate in 10-3 Torr of O2. n = 2.0 @
1.5µ App. Opt. 19, 1837 (1980) |
|
|
Technetium (Tc) |
1570 |
1800 |
2090 |
— |
— |
— |
— |
— |
|
|
Teflon (PTFE) |
— |
— |
— |
— |
— |
— |
W |
Baffled source. Film structure doubtful. |
|
|
Tellurium (Te) |
157 |
207 |
277 |
Poor |
Al2O3
Quartz |
W |
W Ta |
Wets w/o alloying. Toxic. |
|
|
Terbium (Tb) |
800 |
950 |
1150 |
Excel. |
Al2O3 |
— |
Ta |
— |
|
Terbium
Fluoride (TbF3) |
— |
— |
-800 |
— |
— |
— |
— |
— |
|
Terbium
Oxide (Tb2O3) |
— |
— |
1300 |
— |
— |
— |
Ir |
Partially decomposes. |
|
Terbium
Oxide (Tb4O7) |
— |
— |
— |
— |
— |
— |
Ta |
Films TbO. |
|
|
Thallium (Tl) |
280 |
360 |
470 |
Poor |
Al2O3
Quartz |
— |
W Ta |
Wets freely, very toxic. |
|
Thallium
Bromide (TlBr) |
— |
— |
-250S |
— |
Quartz |
— |
Ta |
Toxic n = 2.3 |
|
Thallium
Chloride (TlCl) |
— |
— |
-150S |
— |
Quartz |
— |
Ta |
Toxic n = 2.25 |
|
Thallium
Iodide (TlI) |
— |
— |
-250S |
— |
Quartz |
— |
— |
Toxic n = 2.78 |
|
Thallium
Oxide (Tl2O3) |
— |
— |
350 |
— |
— |
— |
— |
Toxic, Goes to Tl2O @ 850ºC. |
|
|
Thorium (Th) |
1430 |
1660 |
1925 |
Excel. |
— |
W |
W Ta
Mo |
Toxic, radioactive. |
|
Thorium
Bromide (ThBr4) |
S |
S |
S |
— |
— |
— |
Mo |
Toxic n = 2.47 @ 5µ |
|
Thorium
Carbide (ThC2) |
— |
— |
-2300 |
— |
Carbon |
— |
— |
Radioactive. |
|
Thorium
Dioxide (ThO2) |
— |
— |
-2100 |
Good |
— |
— |
W |
Radioactive. n = 1.86 at 2.2 microns |
|
Thorium
Fluoride (ThF4) |
— |
— |
-750 |
Fair |
Vit. Carbon |
— |
Mo |
Radioactive. n = 1.52 Heat substrate to above 150ºC. JVST 12, 919, (1975) |
|
Thorium
Oxyfluoride (ThOF2) |
— |
— |
— |
— |
— |
— |
Mo Ta |
Radioactive. n = 1.52 |
|
Thorium
Sulphide (ThS2) |
— |
— |
— |
— |
— |
— |
— |
Sputtering preferred; or co-evaporate from 2 sources. |
|
|
Thulium (Tm) |
461S |
554 |
680 |
Good |
Al2O3 |
— |
Ta |
— |
|
Thulium
Oxide (Tm2O3) |
— |
— |
1500 |
— |
— |
— |
Ir |
Decomposes. |
|
|
Tin (Sn) |
682 |
807 |
997 |
Excel. |
Al2O3 |
W |
Mo |
Wets Mo; use Ta liner in Eb guns. |
|
Tin
Oxide (SnO2) |
— |
— |
-1000S |
Excel. |
Quartz
Al2O3 |
W |
W |
Films from W oxygen deficient, oxidize in air. n = 2.0 |
|
Tin
Selenide (SnSe) |
— |
— |
-400 |
Good |
Quartz |
— |
— |
JVST 12, 110 (1975) |
|
Tin
Sulphide (SnS) |
— |
— |
-450 |
— |
Quartz |
— |
— |
— |
|
Tin
Telluride (SnTe) |
— |
— |
-450 |
— |
Quartz |
— |
— |
— |
|
|
Titanium (Ti) |
1067 |
1235 |
1453 |
Excel. |
TiC |
— |
W |
Alloys with refractory metals; evolves gas on first heating. |
|
Titanium
Bromide (TiB2) |
— |
— |
— |
Poor |
— |
— |
— |
— |
|
Titanium
Carbide (TiC) |
— |
— |
-2300 |
— |
— |
— |
— |
JVST 12, 851, (1975) |
|
Titanium
Dioxide
(rutile) (TiO2) |
— |
— |
-1300 |
Fair |
— |
— |
W Mo |
Evaporate in 10-4 of O2 onto 350º substrates. n = 2.4
App. Opt. 15, 2986 (1976) |
|
