EVAPORATION
MATERIAL |
TEMPERATURE (ºC)
@ VAP. PRESSURE |
EVAPORATION TECHNIQUES |
REMARKS
n = Index
of Refraction |
10-8
TORR |
10-6
TORR |
10-4
TORR |
ELECTRON
BEAM |
CRUCIBLE |
COIL |
BOAT |
 |
|
Rhenium Oxide (Re2O2) |
— |
— |
- 100 |
— |
— |
— |
— |
— |
|
|
Rhodium (Rh) |
1277 |
1472 |
1707 |
Good |
ThO2 Vit Carbon |
W |
W |
EB gun preferred |
|
|
Rubidium (Rb) |
- 3 |
37 |
111 |
— |
Quartz |
— |
— |
— |
|
|
Rubidum Chloride (RbCl) |
— |
— |
- 550 |
— |
Quartz |
— |
— |
n = 1.49 |
|
|
Rubidium Iodide (RbI) |
— |
— |
- 400 |
— |
Quartz |
— |
— |
— |
|
|
Ruthenium (Ru) |
1780 |
1990 |
2260 |
Poor |
— |
— |
W |
Spits violently in EB. Requires degas. |
|
|
Samarium (Sm) |
373 |
460 |
573 |
Good |
Al2O3 |
— |
Ta |
— |
|
|
Samarium Oxide (Sm2O3) |
— |
— |
— |
Good |
ThO2 |
— |
Ir |
Loses O2. Films smooth, clear. |
|
|
Samarium Sulphide (Sm2S3) |
— |
— |
— |
Good |
— |
— |
— |
AIP Conf. Proc. on Mag. & Mag. Mat. B, 5, 860 (1971) |
|
|
Scandium (Sc) |
714 |
837 |
1002 |
Excel. |
Al2O3BeO |
— |
W |
Alloys with Ta |
|
|
Scandium Oxide (Sc2O3) |
— |
— |
- 400 |
Fair |
— |
— |
— |
Loses oxygen. n = 1.88 @ 5µ |
|
|
Selenium (Se) |
89 |
125 |
170 |
Good |
Al2O3 Vit. Carbon |
W Mo |
W Mo |
Toxic. Poisons vacuum systems. JVST 9, 387 (1972); 12, 573 & 807 (1975) |
|
|
Silicon (Si) |
992 |
1147 |
1337 |
Fair |
BeO Ta Vit. Carbon |
— |
W Ta |
Alloys with W; use heavy W boat. SiO produced above 4 x 10-6 Torr. EB best. n = 3.42 App. Opt. 15, 2348 (1976) |
|
|
Silicon Boride (SiB6) |
— |
— |
— |
Poor |
— |
— |
— |
— |
|
|
Silicon Carbide (SiC) |
— |
— |
1000 |
— |
— |
— |
— |
Sputtering preferred. |
|
|
Silicon Dioxide (SiO2) |
— |
— |
- 1025 |
Excel. |
Al2O3 |
— |
— |
Quartz Excel. in EB. n = 1.47 |
|
|
Silicon Monoxide (SiO) |
— |
— |
- 850 S |
Fair |
Ta |
W |
Ta |
Baffle box source best for resistance evaporation. Low rate suggested. n = 1.6 |
|
|
Silicon Nitride (Si3N4) |
— |
— |
- 800 |
— |
— |
— |
— |
n = 2.1 |
|
|
Silicon Selenide (SiSe) |
— |
— |
550 |
— |
Quartz |
— |
— |
— |
|
|
Silicon Sulphide (SiS) |
— |
— |
450 |
— |
Quartz |
— |
— |
— |
|
|
Silicon Telluride (SiTe2) |
— |
— |
550 |
— |
Quartz |
— |
— |
— |
|
|
Silver (Ag) |
847 |
958 |
1105 |
Excel. |
Al2O3 Mo |
W |
Ta Mo |
Evaporates well from any source. |
|
|
Silver Bromide (AgBr)) |
— |
— |
- 380 |
— |
Quartz |
— |
Ta |
n = 2.25 |
|
|
Silver Chloride (AgCl) |
— |
— |
- 520 |
— |
Quartz |
— |
Mo Pt |
n = 2.07 |
|
|
Silver Iodide (AgI) |
— |
— |
- 500 |
— |
— |
— |
Ta |
n = 2.21 |
|
|
Sodium (Na) |
74 |
124 |
192 |
— |
Quartz |
— |
Ta S.S. |
Use gentle preheat to outgas. Metal reacts violently in air. |
|
|
Sodium Bromide (NaBr) |
— |
— |
- 400 |
— |
Quartz |
— |
— |
Use gentle preheat to outgas. n = 1.64 |
|
|
Sodium Chloride (NaCl) |
— |
— |
530 |
Good |
Quartz |
— |
Ta W Mo |
Cu ovens, little decomposition. Use gentle preheat to outgas. n = 1.54 |
|
|
Sodium Cyanide (NaCN) |
— |
— |
- 550 |
— |
— |
— |
Ag |
Use gentle preheat to outgas. n = 1.45 |
|
|
Sodium Fluoride (NaF) |
— |
— |
- 700 |
Good |
BeO |
— |
Mo Ta W |
Use gentle preheat to outgas. No decomposition. n = 1.30 @ 55µ |
|
|
Sodium Hydroxide (NaOH) |
— |
— |
- 470 |
— |
— |
— |
Pt |
Use gentle preheat to outgas. n = 1.36 |
|
|
Spinel (MgO35Al2O3) |
— |
— |
— |
Good |
— |
— |
— |
n = 1.72 |
|
|
Strontium (Sr) |
239 |
309 |
403 |
Poor |
Vit. Carbon |
W |
W Ta Mo |
Wets but does not alloy with refractory metals. May react violently in air. |
|
|
Strontium Fluoride (SrF2) |
— |
— |
- 1000 |
— |
Al2O3 |
— |
— |
n = 1.44 |
|
|
Strontium Oxide (SrO) |
— |
— |
1500 S |
— |
Al2O3 |
— |
Mo |
Reacts with Mo and W; n = 1.87 |
|
|
Strontium Sulphide (SrS) |
— |
— |
— |
— |
— |
— |
Mo |
Decomposes. n = 2.11 |
|
