EVAPORATION
MATERIAL |
TEMPERATURE (șC)
@ VAP. PRESSURE |
EVAPORATION TECHNIQUES |
REMARKS
n = Index
of Refraction |
10-8
TORR |
10-6
TORR |
10-4
TORR |
ELECTRON
BEAM |
CRUCIBLE |
COIL |
BOAT |
 |
Neodymium
Fluoride (NdF3) |
— |
— |
-900 |
Good |
Al2O3 |
— |
Mo W |
Very little decomposition. n = 1.61 @ .55” |
|
Neodymium
Oxide (Nd2O3) |
— |
— |
-1400 |
Good |
ThO2 |
— |
Ta W |
Loses oxygen, films clear, EB preferred. Hygroscopic n = 1.79 n varies with substrate temp. |
|
|
Nichrome IV (Ni/Cr) |
847 |
987 |
1217 |
Excel. |
Al2O3
Vit. Carbon
BeO |
W |
Al2O3
Coated |
Alloys with refractory metals. |
|
|
Nickle (Ni) |
927 |
1072 |
1262 |
Excel. |
Al2O3
BeO
Vit. Carbon |
W |
W |
Alloys with refractory metals. Forms smooth adherent films. |
|
Nickel
Bromide (NiBr2) |
— |
— |
362S |
— |
— |
— |
Inconel |
— |
|
Nickel
Chloride (NiCl2) |
— |
— |
444S |
— |
— |
— |
Inconel |
— |
|
Nickel
Oxide (NiO) |
— |
— |
-1470 |
— |
Al2O3 |
— |
— |
Dissociates upon heating. n = 2.18 |
|
Niobium
(Columbium) (Nb) |
1728 |
1977 |
2287 |
Excel. |
— |
— |
W |
Attacks W source. |
|
Niobium
Boride (NbB2) |
— |
— |
— |
— |
— |
— |
— |
— |
|
Niobium
Carbide (NbC) |
— |
— |
— |
Fair |
— |
— |
— |
— |
|
Niobium
Nitride (NbN) |
— |
— |
— |
— |
— |
— |
— |
Reactive, evaporate Nb in 10-3 |
|
Niobium
Oxide (NbO) |
— |
— |
1100 |
— |
— |
— |
Pt |
— |
|
Niobium
Pentoxide (Nb2O5) |
— |
— |
— |
— |
— |
— |
W |
n = 2.3 |
|
Niobium
Telluride (NbTeX) |
— |
— |
— |
— |
— |
— |
— |
Composition variable. |
|
|
Niobium-Tin (Nb3Sn) |
— |
— |
— |
Excel. |
— |
— |
— |
Co-evaporate from 2 sources. |
|
Niobium
Trioxide (Nb2O3) |
— |
— |
— |
— |
— |
— |
W |
— |
|
|
Osmium (Os) |
2170 |
2430 |
2760 |
Fair |
— |
— |
— |
— |
|
|
Palladium (Pd) |
842 |
992 |
1192 |
Excel. |
Al2O3
BeO |
W |
W |
Alloys with refractory metals; rapid evaporation suggested. Spits in EB. |
|
Palladium
Oxide (PdO) |
— |
— |
575 |
— |
Al2O3 |
— |
— |
Decomposes. |
|
Parylene
(Union
Carbide) (C8H8) |
— |
— |
— |
— |
— |
— |
— |
Vapor despositable plastic. |
|
|
Permalloy (Ni/Fe) |
947 |
1047 |
1307 |
Good |
Al2O3
Vit. Carbon |
— |
W |
Film low in Ni content. Use 84% Ni source. JVST Vol. 7, No. 6, p. 573 |
|
|
Phosphorus (p) |
327 |
361 |
402 |
— |
Al2O3 |
— |
— |
Metal reacts violently in air. |
|
|
Platinum (Pt) |
1292 |
1492 |
1747 |
Excel. |
C ThO2 |
W |
W |
Alloys with metals. Films soft, poor adhesion. |
|
|
Plutonium (Pu) |
— |
— |
— |
— |
— |
— |
W |
Toxic, radioactive. |
|
|
Polpnium (Po) |
117 |
170 |
244 |
— |
Quartz |
— |
— |
Radioactive. |
|
|
Potassium (K) |
23 |
60 |
125 |
— |
Quartz |
— |
Mo |
Metal reacts violently in air. Use gentle preheat to outgas. |
|
Potassium
Bromide (KBr) |
— |
— |
-450 |
— |
Quartz |
— |
Ta Mo |
Use gentle preheat to outgas. n = 1.56 |
|
Potassium
Chloride (KCl) |
— |
— |
510 |
Good |
— |
— |
Ta Ni |
Use gentle preheat to outgas. n = 1.49 |
|
Potassium
Fluoride (KF) |
— |
— |
-500 |
Poor |
Quartz |
— |
— |
Use gentle preheat to outgas. n = 1.35 |
|
Potassium
Hydroxide (KOH) |
— |
— |
-400 |
— |
— |
— |
Pt |
Use gentle preheat to outgas. |
|
Potassium
Iodide (KI) |
— |
— |
-500 |
— |
— |
— |
Ta |
Use gentle preheat to outgas. n = 1.68 |
|
|
Praseodymium (Pr) |
800 |
950 |
1150 |
Good |
— |
— |
Ta |
— |
|
Praseodymium
Oxide (Pr2O3) |
— |
— |
1400 |
Good |
ThO2 |
— |
Ir |
Loses oxygen. n = 2.0 |
|
|
Radium (Ra) |
246 |
320 |
416 |
— |
— |
— |
— |
— |
|
|
Rhenium (Re) |
1928 |
2207 |
2571 |
Poor |
— |
— |
— |
Fine wire will self-evaporate. |
|
