EVAPORATION
MATERIAL |
TEMPERATURE (șC)
@ VAP. PRESSURE |
EVAPORATION TECHNIQUES |
REMARKS
n = Index
of Refraction |
10-8
TORR |
10-6
TORR |
10-4
TORR |
ELECTRON
BEAM |
CRUCIBLE |
COIL |
BOAT |
 |
Lead
Iodide (PbI2) |
— |
— |
-500 |
— |
Quartz |
— |
Pt |
n = 2.7 J. Opt. Soci. 65, 914 |
|
Lead
Oxide (PbO) |
— |
— |
-550 |
— |
Quartz
Al2O3 |
— |
Pt |
No decomposition. n = 2.55 |
|
Lead
Stannate (PbSnO3) |
670 |
780 |
905 |
Poor |
Al2O3 |
— |
Pt |
Disproportionates. |
|
Lead
Selenide (PbSe) |
— |
— |
-500S |
— |
Graphite
Al2O3 |
— |
W Mo |
— |
|
Lead
Sulphide (PbS) |
— |
— |
550S |
— |
Quartz
Al2O3 |
— |
W |
Little decomposition. n = 3.91 |
|
Lead
Telluride (PbTe) |
780 |
910 |
1050 |
|
Al2O3
Graphite |
— |
Mo Pt
Ta |
Vapors toxic. Deposits Te rich. Sputtering preferred, or co-evaporate from sources.
n = 5.6 @ 5” |
|
Lead
Titanate (PbTiO3) |
— |
— |
— |
— |
— |
— |
Ta |
— |
|
|
Lithium (Li) |
227 |
307 |
407 |
Good |
Al2O3
BeO |
— |
Ta
S.S. |
Metal reacts violently in air. |
|
Lithium
Bromide (LiBr) |
— |
— |
-500 |
— |
— |
— |
Ni |
n = 1.78 |
|
Lithium
Chloride (LiCl) |
— |
— |
400 |
— |
— |
— |
Ni |
Use gentle preheat for outgas. n = 1.66 |
|
Lithium
Fluoride (LiF) |
875 |
1020 |
1180 |
Good |
Al2O3 |
— |
Ni, Ta
Mo W |
Rate control important for optical films. Use gentle preheat for outgas. n = 1.36. J. Appl.
Opt. 11, 2245 (1972) |
|
Lithium
Iodide (LiI) |
— |
— |
400 |
— |
— |
— |
Mo W |
— |
|
Lithium
Oxide (Li2O) |
— |
— |
850 |
— |
— |
— |
Pt Ir |
n = 1.64 |
|
|
Lutetium (Lu) |
— |
— |
1300 |
Excel. |
Al2O3 |
— |
Ta |
— |
|
Lutetium
Oxide (Lu2O3) |
— |
— |
1400 |
— |
— |
— |
Ir |
Decomposes. |
|
|
Magnesium (Mg) |
185S |
247S |
327S |
Good |
Al2O3
Vit. Carbon |
W |
W Mo
Ta, Cb |
Extremely high rates possible. |
|
Magnesium
Aluminate (MgAl2O4) |
— |
— |
— |
Good |
— |
— |
— |
Natural spinel. |
|
Magnesium
Bromide (MgBr2) |
— |
— |
-450 |
— |
— |
— |
Ni |
Decomposes. |
|
Magnesium
Chloride (MgCl2) |
— |
— |
400 |
— |
— |
— |
Ni |
Decomposes. n = 1.6 |
|
Magnesium
Fluoride (MgF2) |
— |
— |
1000 |
Excel. |
Al2O3 |
— |
Mo Ta |
Rate control and substrate heat important for optical films. n = 1.38 J. Appl. Opt. 11,
2245 (1972) |
|
Magnesium
Iodide (MgI2) |
— |
— |
200 |
— |
— |
— |
Ir |
— |
|
Magnesium
Oxide (MgO) |
— |
— |
1300 |
Good |
Carbon
Al2O3 |
— |
— |
W produces volatile oxides. n = 1.7 J. Appl. Opt. 11, 2243 (1972) |
|
|
Manganese (Mn) |
507S |
572S |
647S |
Good |
Al2O3
BeO |
W |
W Ta
Mo |
— |
|
Manganese
Bromide (MnBr2) |
— |
— |
500 |
— |
— |
— |
Inconel |
— |
|
Manganese
Chloride (MnCl2) |
— |
— |
450 |
— |
— |
— |
Inconel |
— |
|
Manganese
Oxide (Mn3O4) |
— |
— |
— |
— |
— |
— |
W |
— |
|
Manganese
Sulphide (MnS) |
— |
— |
1300 |
— |
— |
— |
Mo |
Decomposes. n = 2.7 |
|
|
Mercury (Hg) |
-68 |
-42 |
-6 |
— |
— |
— |
— |
— |
|
Mercury
Sulphide (HgS) |
— |
— |
250S |
— |
Al2O3 |
— |
— |
Decomposes. |
|
|
Molybdenum (Mo) |
1592 |
1822 |
2117 |
Excel. |
— |
— |
— |
Films smooth, hard. Careful degas req'd. |
|
Molybdenum
Boride (MoB2) |
— |
— |
— |
Poor |
— |
— |
— |
— |
|
Molybdenum
Carbide (Mo2C) |
— |
— |
— |
Fair |
— |
— |
— |
Evaporation of Mo(Co)6 yields Mo2C. |
|
Molybdenum
Disulphide (MoS2) |
— |
— |
-50 |
— |
— |
— |
— |
— |
|
Moylbdenum
Silicide (MoSi2) |
— |
— |
— |
— |
— |
— |
W |
Decomposes. |
|
Molybdenum
Trioxide (MoO3) |
— |
— |
-900 |
— |
Al2O3
BN |
— |
Mo Pt |
Slight O2 loss. n = 1.9 |
|
|
Neodynium (Nd) |
731 |
871 |
1062 |
Excel. |
Al2O3 |
— |
Ta |
Low Ta solubility. |
|
