EVAPORATION
MATERIAL |
TEMPERATURE (șC)
@ VAP. PRESSURE |
EVAPORATION TECHNIQUES |
REMARKS
n = Index
of Refraction |
10-8
TORR |
10-6
TORR |
10-4
TORR |
ELECTRON
BEAM |
CRUCIBLE |
COIL |
BOAT |
 |
Glass,
Schott 8329 |
— |
— |
— |
Excel. |
— |
— |
— |
Evaporable alkali glass. Melt in air before evaporating. n = 1.47 |
|
|
Gold (Au) |
807 |
947 |
1132 |
Excel. |
Al2O3 BN
Vit. Carbon |
W |
W, Mo
Coated
Al2O3 |
Films soft, not very adherent. |
|
|
Hatnium (Hf) |
2160 |
2250 |
3090 |
Good |
— |
— |
— |
— |
|
Hafnium
Carbide (HfC) |
— |
— |
-2600S |
— |
— |
— |
— |
— |
|
Hafnium
Oxide (HfO2) |
— |
— |
-2500 |
Fair |
— |
— |
W |
Film HfO n = 2.0 @ .5” App. Opt. Apr. 1977 |
|
|
Holmium (Ho) |
650S |
770S |
950S |
Good |
— |
W |
W Ta |
— |
|
Holmium
Fluoride (HoF3) |
— |
— |
-800 |
— |
Quartz |
— |
— |
— |
|
Holmium
Oxide (Ho2O3) |
— |
— |
— |
— |
— |
— |
Ir |
Loses oxygen. |
|
Inconel
(Ni/Cr/Fe) |
— |
— |
— |
Good |
— |
W |
W |
Use fine wire pre-wrapped on W. Low rate req'd. for smooth films. |
|
|
Indium (In) |
487 |
597 |
742 |
Excel.;
Mo Liner
req'd |
Graphite
Al2O3 |
W |
W Mo |
Wets W and Cu; use Mo liner in guns. |
|
Indium
Antimonide (InSb) |
500 |
— |
-400 |
— |
— |
— |
W |
Toxic, Decomposes; sputtering preferred; or co-evaporate from 2 sources; flash.
n = 4.3 @ 1” |
|
Indium
Arsenide (InAs) |
780 |
870 |
970 |
— |
— |
— |
W |
Toxic, Decomposes; sputtering preferred; or co-evaporate from 2 sources; flash.
n = 4.5 @ 1” |
|
Indium
Oxide (In2O3) |
— |
— |
-1200S |
Good |
Al2O3 |
— |
W Pt |
Film In2O; transparent conductor. JVST 12, 99 (1975) |
|
Indium
Phosphide (InP) |
— |
630 |
730 |
— |
Graphite |
— |
W Ta |
Deposits P rich. Flash evaporate. |
|
Indium
Selenide (In2Se3) |
— |
— |
— |
— |
— |
— |
— |
Sputtering preferred; or co-evaporate from 2 sources; flash. |
|
Indium
Sesquisulphide (In2S3) |
— |
— |
850S |
— |
Graphite |
— |
— |
Film In2S |
|
Indium
Sulphide (In2S) |
— |
— |
650 |
— |
Graphite |
— |
— |
— |
|
Indium
Telluride (In2Te3) |
— |
— |
— |
— |
— |
— |
— |
Sputtering preferred; or co-evaporate from 2 sources; flash. |
|
|
Iridium (Ir) |
1850 |
2080 |
2380 |
Fair |
ThO2 |
— |
— |
— |
|
|
Iron (Fe) |
858 |
998 |
1180 |
Excel. |
Al2O3
BeO |
W |
W |
Attacks W. Films hard, smooth. Use gentle preheat to outgas. |
|
Iron
Bromide (FeBr2) |
— |
— |
561 |
— |
Fe |
— |
— |
— |
|
Iron
Chloride (FeCl2) |
— |
— |
300S |
— |
Fe |
— |
— |
— |
|
Iron
Iodide (FeI2) |
— |
— |
400 |
— |
Fe |
— |
— |
— |
|
Iron
Oxide (FeO) |
— |
— |
— |
Poor |
— |
— |
— |
Decomposes; sputtering preferred. |
|
Iron
Oxide (Fe2O3) |
— |
— |
— |
Good |
— |
— |
W |
Disproportionates to Fe3O4 at 1530șC, n = 3.0 |
|
Iron
Sulphide (FeS) |
— |
— |
— |
— |
Al2O3 |
— |
— |
Decomposes. |
|
|
Kanthal (FeCrAl) |
— |
— |
-1150 |
— |
— |
W |
W |
JVST 7, 739 (1980) |
|
|
Lanthanum (La) |
990 |
1212 |
1388 |
Excel. |
Al2O3 |
— |
W Ta |
Films will burn in air if scraped. |
|
Lanthanum
Boride (LaB6) |
— |
— |
— |
Good |
— |
— |
— |
— |
|
Lanthanum
Bromide (LaBr3) |
— |
— |
— |
— |
— |
— |
— |
n = 1.94 Hygroscopic. |
|
Lanthanum
Fluoride (LaF3) |
— |
— |
900S |
Good |
— |
— |
Ta Mo |
No decomposition. n = 1.59 @ .55” |
|
Lanthanum
Oxide (La2O3) |
— |
— |
1400 |
Good |
— |
— |
W Ta |
Loses oxygen. n = 1.9 @ .5” |
|
|
Lead (Pb) |
342 |
427 |
497 |
Excel. |
Al2O3
Quartz |
W |
W Mo |
Toxic. Carefully controlled rates req'd. for superconductors. |
|
Lead
Bromide (PbBr2) |
— |
— |
-300 |
— |
— |
— |
— |
— |
|
Lead
Chloride (PbCl2) |
— |
— |
-325 |
— |
Al2O3 |
— |
Pt |
Little decomposition. n = 2.2 |
|
Lead
Fluoride (PbF2) |
— |
— |
-400 |
— |
BeO |
— |
W Pt,
Mo |
Toxic. n = 1.75 @ .3” |
|
