EVAPORATION
MATERIAL |
TEMPERATURE (șC)
@ VAP. PRESSURE |
EVAPORATION TECHNIQUES |
REMARKS
n = Index
of Refraction |
10-8
TORR |
10-6
TORR |
10-4
TORR |
ELECTRON
BEAM |
CRUCIBLE |
COIL |
BOAT |
 |
|
Boron (B) |
1278S |
1548S |
1797S |
Excel. |
C
Vit. Carbon |
— |
C |
Material explodes with rapid cooling. Forms carbide with container. |
|
Boron
Carbide (B4C) |
2500 |
2580 |
2650 |
Excel. |
— |
— |
— |
Similar to chromium. |
|
Boron
Nitride (BN) |
— |
— |
-1600S |
Poor |
— |
— |
— |
Sputtering preferred; Decomposes. |
|
Boron
Oxide (B2O3) |
— |
— |
-1400 |
Good |
— |
— |
Pt, Mo |
n = 1.46 |
|
Boron
Trisulphide (B2S3) |
— |
— |
800 |
— |
Graphite |
— |
— |
— |
|
|
Cadmium (Cd) |
64 |
120 |
180 |
Poor |
Al2O3
Quartz |
— |
W, Cb
Mo Ta |
Poisons vacuum systems, low sticking coefficient. |
|
Cadmium
Arsenide (Cd3As2) |
— |
— |
— |
— |
Quartz |
— |
— |
— |
|
Cadnium
Bromide (CdBr2) |
— |
— |
-300 |
— |
— |
— |
— |
— |
|
Cadmium
Chloride (CdCl2) |
— |
— |
-400 |
— |
— |
— |
— |
— |
|
Cadmium
Fluoride (CdF2) |
— |
— |
-500 |
— |
— |
— |
— |
n = 1.56 |
|
Cadmium
Iodide (CdI2) |
— |
— |
-250 |
— |
— |
— |
— |
— |
|
Cadmium
Oxide (CdO) |
— |
— |
-530 |
— |
— |
— |
— |
Disproportionates. n = 2.49 |
|
Cadmium
Selenide (CdSe) |
— |
— |
540S |
Good |
Al2O3
Quartz |
— |
Mo Ta |
Evaporates easily. n = 2.4 @ 6” |
|
Cadmium
Siliside (CdSiO2) |
— |
— |
-600 |
— |
— |
— |
— |
n = 1.69 |
|
Cadmium
Sulphide (CdS) |
— |
— |
550S |
Fair |
Al2O3
Quartz |
— |
W Mo
Ta |
Sticking coefficient strongly affected by substrate temperature. Stoichiometry
variable. n = 2.4 JVST 12 188 (1975) |
|
Cadmium
Telluride (CdTe) |
— |
— |
450 |
— |
— |
W |
W Mo
Ta |
Stoichiometry depends on substrate temperature. n = 2.6 |
|
|
Calcium (Ca) |
272S |
357S |
459S |
Poor |
Al2O3 |
W |
W |
Corrodes in air. |
|
Calcium
Flouride (CaF2) |
— |
— |
-1100 |
Excel. |
Quartz |
W Mo
Ta |
W Mo
Ta |
Rate control important. Use gentle preheat to outgas. n = 1.2 - 1.4 |
|
Calcium
Oxide (CaO) |
— |
— |
-1700 |
— |
ZrO2 |
— |
W Mo |
Forms volatile oxides with W and Mo. n = 1.84 |
|
Calcium
Silicate (CaO-SiO2) |
— |
— |
— |
Good |
Quartz |
— |
— |
n = 1.61 |
|
Calcium
Sulphide (CaS) |
— |
— |
1100 |
— |
— |
— |
Mo |
Decomposes. n = 2.14 |
|
|
Calcium
Titanate (CaTiO3) |
1490 |
1600 |
1690 |
Poor |
— |
— |
— |
Disproportionates except in sputtering. |
|
Calcium
Tungstate (CaWO4) |
— |
— |
— |
Good |
— |
— |
W |
n = 1.92 |
|
|
Carbon (C) |
1657S |
1867S |
2137S |
Excel. |
— |
— |
— |
EB preferred. Arc evaporation. Poor film adhesion. Vitreous carbon n = 1.47 |
|
|
Cerium (Ce) |
970 |
1150 |
1380 |
Good |
Al2O3 BeO
Vit. Carbon |
W |
W Ta |
Films oxidize easily. |
|
Ceric
Oxide (CeO2) |
1890S |
2000S |
2310S |
Good |
— |
— |
W |
Use 250-300șC substrate temperature. n = 2.2-2.4. Reacts with W. |
|
Cerium
Fluoride (CeF3) |
— |
— |
-900 |
Good |
— |
— |
W Mo
Ta |
Use gentle preheat to outgas. n = 1.63 @ .55” |
|
Cerium
Oxide (Ce2O3) |
— |
— |
— |
Fair |
— |
— |
W |
Alloys with source; use .015-.020 W boat. |
|
|
Cssium (Cs) |
-16 |
+22 |
+30 |
— |
Quartz |
— |
S.S. |
— |
|
Cesium
Bromide (CsBr) |
— |
— |
-400 |
— |
— |
— |
W |
n = 1.70 |
|
Cesium
Flouride (CsF) |
— |
— |
-500 |
— |
— |
— |
W |
— |
|
Cesium
Hydroxide (CsOH) |
— |
— |
550 |
— |
— |
— |
Pt |
— |
|
Cesium
Iodide (CsI) |
— |
— |
-500 |
— |
Pt
Quartz |
— |
W. Pt |
n = 1.79 |
|
|
Chiolote (Na5Al3F14) |
— |
— |
-800 |
— |
— |
— |
Mo W |
n = 1.33 |
|
|
Chromium (Cr) |
837S |
977S |
1157S |
Good |
Vit. Carbon |
W |
Cr-plated
rod or
strip |
Films very adherent. High possible. |
|
