Evaporation Tables & Crucible Recommendations

EVAPORATION MATERIAL	TEMPERATURE (șC) @ VAP. PRESSURE			EVAPORATION TECHNIQUES				REMARKS n = Index of Refraction
	10-8 TORR	10-6 TORR	10-4 TORR	ELECTRON BEAM	CRUCIBLE	COIL	BOAT
Aluminum (Al)	677	821	1010	Xint.	TiB2-BN ZrB2, BN	W	TiB2, W	Alloys and wets; tungsten-stranded superior
Aluminum Antimonide (AlSb)	—	—	—	—	—	—	—	—
Aluminum Arsenide (AlAs)	—	—	-1300	—	—	—	—	—
Aluminum Bromide (AlBr3)	—	—	-50	—	Graphite	—	Mo	—
Aluminum Carbide (Al4C3)	—	—	-800	Fair	—	—	—	n = 2.7
Aluminum 2% Copper (Al2%Cu)	—	—	—	—	—	—	—	Wire feed and flash. Difficult from dual sources.
Aluminum Fluoride (AlF3)	410S	490S	700S	Poor	Graphite	—	Mo, W	n = 1.38 @ .55 ”
Aluminum Nitride (AlN)	—	—	-1750	Fair	—	—	—	Decomposes. Reactive evaporate in 10-3 N2 with glow discharge.
Aluminum Oxide (Al2O3)	—	—	1550	Excel.	—	—	W	Sapphire excellent in EB. forms smooth hard films. n = 1.66
Aluminum 2% Silicon (Al2%Si)	—	—	1010	—	TiB2-BN	—	—	Wire feed and flash. Difficult from dual sources.
Antimony (Sb)	279S	345S	425S	Poor	BN, C Al2O3	Mo Ta	Mo, Ta Al2O3 Coated	Toxic. Evaporates well. Firm structure is rate-dependant.
Antimony Telluride (Sb2Te3)	—	—	600	—	Carbon	—	—	Decomposes over 750șC
Antimony Trioxide (Sb2O3)	—	—	-300S	Good	BN, Al2O3	—	Pt	Toxic. Decomposes on W. n = 2.05
Antimony Triselenide (Sb2Se3)	—	—	—	—	Carbib	—	Ta	Stoichiometry varible.
Antimony Trisulphide (Sb2S3)	—	—	-200	Good	Al2O3	—	Mo Ta	n = 3.01 @ 55 ”. No decomposition.
Arsenic (As)	107S	150S	210S	Poor	Al2O3 BeO Vit. Carbon	—	C	Toxic. Sublimes rapidly at low temperatures.
Arsenic Selenide (As2Se3)	—	—	—	—	Al2O3 Quartz	—	—	n = 2.41 @ 3.8” JVST 10. 748 (1973)
Arsenic Trisulphide (As3S3)	—	—	-400	Fair	Al2O3 Quartz	—	Mo	n = 2.8 JVST 10, 748 (1973)
Arsenic Tritelluride (As2Te3)	—	—	—	—	—	—	Flash	JVST 10, 748 (1975)
Barium (Ba)	545	627	735	Fair	Metals	W	W Ta Mo	Wets w/o alloying - reacts with ceramics.
Barium Chloride (BaCl2)	—	—	-650	—	—	—	Ta Mo	Use gentle preheat to outgas.
Barium Fluoride (BaF2)	—	—	-700S	Good	—	—	Mo	n = 1.29 @ 5” JVST 21. 2052 (1982) Density Rate Dependent.
Barium Oxide (BaO)	—	—	-1300	Poor	Al2O3	—	Pt	Decomposes slightly. n = 1.98
Barium Sulphide (BaS)	—	—	1100	—	—	—	Mo	n = 2.16
Barium Titanate (BaTiO3)	D	D	D	—	—	—	—	Decomposes, yields free Ba from single source; sputtering perferred; or co-evaporate from 2 sources.
Beryllium (Be)	710	878	1000	Excel.	BeO C Vit. Carbon	W	W Ta	Wets W/Mo/Ta. Metal powder and oxides are toxic. Evaporates easily.
Beryllium Chloride (BeCl2)	—	—	-150	—	—	—	—	—
Beryllium Fluoride (BeF2)	—	—	-200S	Good	—	—	—	Toxic.
Beryllium Oxide (BeO)	—	—	1900	Good	—	—	—	Powders toxic. No decomposition from EB guns. n = 1.72
Bismuth (Bi)	330	410	520	Excel.	Ai2O3 Vit. Carbon	W	W, Mo Al2O3 Ta	Vapors are toxic. High resistivity. No shorting of baskets.
Bismuth Fluoride (BiF3)	—	—	-300	—	Graphite	—	—	n = 1.74 @ 1” 1.64 @ 10” App. Opt. 18, 105 (1079)
Bismuth Oxide (Bi2O3)	—	—	-1400	Poor	—	—	Pt	Vapors are toxic. n = 2.55. JVST 12, 63 (1975)
Bismuth Selenide (Bi2Se3)	—	—	-650	Good	Graphite Quartz	—	—	Sputtering preferred; or co-evaporate from 2 sources.
Bismuth Telluride (Bi2Te3)	—	—	-600	—	Graphite Quartz	—	W Mo	Sputtering preferred; or co-evaporate from 2 sources.
Bismuth Titanate (Bi2Ti2O7)	D	D	D	—	—	—	—	Decomposes. Sputtering preferred; or co-evaporate from 2 sources in 10-202
Bismuth Trisulphide (Bi2S3)	—	—	—	—	—	—	—	n = 1.5