MAT-VAC Technology - Sputtering Systems, Equipment Parts, Thin Film Coating, Evaporation Materials

Crucible Liners

Crucible Liners are very useful in electron-beam evaporation as they typically increase the evaporation rates of the material being deposited and they simplify the task of changing from one evaporation material to another. Crucible Liners are available in a varity of materials and each has it's particular application/suitability depending on the material being evaporated.

Tungsten (W)
Very strong material machined from solid rod. Do not use Tungsten liner with metals which may alloy with it at melting temperatures.

Molybdenum (Mo)
Very strong material machined from solid rod. Do not use Moly liner with metals which may alloy with it at melting temperatures.

Boron Nitride (BN)
Usually used in evaporation of Aluminum. Provides good thermal shock resistance.

Graphite (C)
Used regularly for many different types of evaporation materials. Will assist in increased evaporation rates.

Vitreous Carbon
Especially well suited to chemical etching processes because it is highly resistant to chemicals.

Alumina (Al2O3)
Used for many different types of evaporation materials.

Copper (Cu)
Used to prevent contamination of the OFHC copper E-Beam Gun hearth/pocket. It can also be used to reduce the E-Beam Gun hearth/pocket size.

4cc Crucible - For SFIH-270-0, TIH-180 & LTFH-180 Sources

Material

VOLUME

PART #

Molybdenum

.750

.615

.593

.093

2.4cc

104-8361

Boron Nitride

.750

.615

.593

.093

2.4cc

102-6604

Intermetallic

.750

.615

.593

.093

2.4cc

303-0004

Aluminum Oxide

.750

.615

.593

.093

2.4cc

9998-9400

Tungsten

.750

.615

.593

.093

2.4cc

203-6004

7cc Crucible - For SFIH-270-1, STIH-270-1, FIH-270, TIH-270 and FIH-180 Sources

Material

VOLUME

PART #

Molybdenum

.981

.865

.563

.083

4.8cc

518-7751

Boron Nitride

.981

.865

.563

.093

4.3cc

102-6647

Vitreous Carbon

.981

.865

.563

.093

4.3cc

9998-9002

Intermetallic

.981

.865

.563

.093

4.3cc

515-7751

Aluminum Oxide

.981

.865

.563

.093

4.3cc

9998-9070

Copper

.981

.865

.563

.093

4.3cc

701-0007

Tungsten

.981

.865

.563

.093

4.3cc

203-6007

15cc Crucible - For STIH-270-2M and STIH-270-2 Sources

Material

VOLUME

PART #

Molybdenum

1.230

1.130

.670

.125

10cc

503-0292

Boron Nitride

1.230

1.130

.670

.125

10cc

102-6615

Vitreous Carbon

1.300

1.130

.670

.093

11cc

9998-0013

Intermetallic

1.300

1.130

.670

.093

11cc

615-8262

Aluminum Oxide

1.300

1.130

.670

.093

11cc

9998-9115

Copper

1.300

1.130

.670

.093

11cc

701-0015

Tungsten

1.300

1.130

.670

.093

11cc

203-8999

25cc Crucible

Material

VOLUME

PART #

Molybdenum
4 Pocket Gun

N/A

515-2142-4

Molybdenum
6 Pocket Gun

N/A

203-0525-6

Boron Nitride
4 Pocket Gun

N/A

102-0625-4

Boron Nitride
6 Pocket Gun

N/A

102-6625-6

Vitreous Carbon
4 Pocket Gun

N/A

515-2212-4

Vitreous Carbon
6 Pocket Gun

N/A

515-2212-6

Intermetallic
4 Pocket Gun

N/A

515-2222-4

Intermetallic
6 Pocket Gun

N/A

515-2222-6

Aluminum Oxide
4 Pocket Gun

N/A

9998-9025-4

Aluminum Oxide
6 Pocket Gun

N/A

9998-9625-6

Tungsten
4 Pocket Gun

N/A

203-6025-4

Tungsten
6 Pocket Gun

N/A

9998-9052-6

40cc Crucible - For SFIH-270-2 and 2-inch -270^{^o} Sources

Material

VOLUME

PART #

Molybdenum

1.512

1.456

1.093

.250

18cc

203-6512

Boron Nitride

1.658

1.456

1.093

.175

24cc

102-6640

Vitreous Carbon

1.852

1.456

1.055

.085

30cc

9998-9005

Intermetallic

1.852

1.456

1.055

.085

30cc

303-6872

Aluminum Oxide

1.852

1.456

1.055

.085

30cc

9998-9040

Copper

1.852

1.456

1.055

.085

30cc

701-0040

Tungsten

1.852

1.456

1.055

.085

30cc

9998-9042

* Temescal is a registered trademark of The BOC Group, Inc. Temescal part numbers are for reference purposes only.