MAT-VAC Technology, Inc. - Sputtering Cathode Assemblies

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Welcome to the NEW Price Performance Leader
of In Line Load Lock Batch Sputtering Systems
and Thin Film Technology

Sputtering Cathode Assemblies

MRC OEM Equivalent Sputtering Cathode Assemblies

822/8620/8630/8667/8671 Circular Type900/600 Series INSET®¹ Type Cathode Assemblies902/903/943 Series Planar Rectangular603/643/662 Series Planar RectangularMRC Type Target Backing Plate ConfigurationsPopular OEM Backing Plates

1. Note: INSET ® is a registered trademark of Praxair Corp.

Perkin-Elmer OEM Equivalent Sputtering Cathode Assemblies

Delta RF/DC Magnetron

OEM Part No. 221-313-0008" Diameter DC Magnetron

OEM Part No. 221-264-3008" Diameter RF Diode/Magnetron*

OEM Part No. 221-190-5006" Diameter RF Diode
OEM Part No. 720-145-000Perkin-Elmer Target Backing PlatesPopular OEM Backing Plates

* RF Magnetron, OEM Part No. 221-198-400, requires the addition of the 8" RF Magnetron Assembly, OEM Part No. 221-198-310

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