Contact Us   |  Phone: 888.998.9975  |  Fax: 386.238.0976

Welcome to the NEW Price Performance Leader
of In Line Load Lock Batch Sputtering Systems
and Thin Film Technology

Replacement Parts

Request For Quote Form

OEM Equivalent Welded Bellows Assemblies
MRC Type OEM Part No.
603 Load Lock 813-28-450
603 Pallet Lift, Bottom 813-28-290
603 Pallet Lift, Top 813-28-690
902/903/943/603 Etch 818-27-100
902/903/943 Load Lock 822-16-100
 
Perkin-Elmer Type OEM Part No.
1 1/2" Process Chamber Roughing Valve 500-582-700
2" Load Lock Roughing Valve 500-581-100
Order by OEM Part No. - Request For Quote Form


Specialized OEM Equivalent Tools
MRC Type OEM Part No.  
Safety Bar (Aluminum) MRC900SAFETYBAR
 
Perkin-Elmer Type OEM Part No.  
Delta Target Assembly Installation Tool DELTA-TGT-TOOL
RF Target Assembly Installation Tool RF-TGT-TOOL
Order by OEM Part No. - Request For Quote Form


Engineering / Repair Services
MAT-VAC has the capability to reverse engineer/duplicate your existing part(s) thru the use of proprietary advanced physical and analytical inspection techniques and also to repair your defective part(s). Simply send us your part(s) and a written purchase order with the dollar amount to be determined (TBD). We will examine it at no charge or obligation. Upon completion of our inspection (typically one week or less), a firm price quote will be sent to you. DO NOT send any items which are currently patent protected or proprietary drawing(s) and/or other intellectual property belonging to any other company.

Then it's up to you to decide whether you wish for MAT-VAC to proceed. Our goal is to provide you with a high quality MAT-VAC part(s) and in the process save your company money.

Please send your part(s) to:

    MAT-VAC Technology, Inc.
    c/o: Engineering Dept.
    415 Orange Ave.
    Daytona Beach, FL 32114
Note: Only items received with a written purchase order, as per above, will be examined.


Electro-Mechanical
Gears/ Chains Coils Cyro Pumps Hydraulic Valves
Switches Ferro-fluids Gate Valves Contacts
Solenoids Gripper Assy Etch Platforms RF Networks/td>
Hydraulic Cylinders      


Electronic Parts
Heater Lamps Printed Computer Boards RF Generators Power Supplies
Computer Boat Analog Rack Ion Tubes Tuning Capacitors


Spares/Consumable Parts
L/L Cathode Assembly O-Rings Shutter Assembly
Dark Space Shields Ceramic Insulators Shields Gauges
Chain Guards Vented Hardware Wafer Pallet Gripper
Gaskets Etch Magnets  


Request For Quote Form




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