MAT-VAC Sputtering Systems - Backing Plates and Bonding

Welcome to the NEW Price Performance Leader
of In Line Load Lock Batch Sputtering Systems
and Thin Film Technology

BACKING PLATES AND BONDING

Our selection of Copper and Stainless Steel, circular and rectangular replacement backing plates is one of the largest in the industry. Backing plates are available to fit almost every model of OEM sputtering system ever manufactured.

Assorted Target Backing Plates

OEM sputtering system manufacturers
Balzers	CPA	CVC Products	Denton	Edwards	Leybold
MRC	Perkin-Elmer	Vac-Tec	Gencoa	Temescal/HRC	Alcatel/Comptech
Torus(K.J.Lesker)	Sloan	Materials Science	US Gun	Mighty MAC	Edwards
Cooke	Innotec	Angstrom Science	Nordiko	Veeco	GCA
Anatech	AJA	Commonwealth	Plasma Sciences	Varian	Sputtered Films
Ulvac	Anelva	Soleras	KDF	Angstrom Science	Sierra Applied Sciences

Note: This is not an all inclusive list.

Both standard and custom backing plates are available. Please contact us with your requirement(s).

Target bonding which consists of the application of proprietary Thin Film coatings and specialty indium based solders to the customer supplied or MAT-VAC′s newly remanufactured backing plate(s) / sputtering target mating surfaces is one of our core specialties. When a backing plate is to be supplied by the customer, the backing plate is rigorously inspected to insure its serviceability. We will inform you, upon receipt of your backing plate if repair or replacement is required. When inquiring, please let us know if target bonding will be required for your target and the type of backing plate that you will be utilizing.

Please also notify us if a spent target will be sent attached to the backing plate.

Spent targets are not returned unless otherwise specified in writing in the purchase order.

All bonds are guaranteed 100%. Extensive measures are taken to insure all bonds will withstand the rigors of the sputtering process. We incorporate vacuum bonding technology, coupled with X-Ray and ultrasonic testing techniques.

Silver Epoxy target bonding is also available. Please contact us for more details.

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Regardless of your particular requirement, MAT-VAC will strive to serve you.
Please contact MAT-VAC with any questions you may have concerning our capabilities.