One of the services that MAT-VAC Technologies, Inc provides is modernization of systems. In this example we've taken an older MRC 8667 sputtering system and completely modernized it in all aspects. Not only are the physical mechanical systems completely remanufactured, but the control system and computer technology was also brought up to state-of-the-art standards.
 Gone completely are the old relay or custom controller systems, in their place you'll find a modern industrial quality control system with touch screens and pictorial control (GUI).
This system was also upgraded to include our unique flapper valve Vac-Loc™ load lock system. This allows part interchange without dumping the chamber to room pressure, thus speeding cycle time and reducing contamination levels. Even compared to conventional load locks, the MAT-VAC Technologies, Inc. Vac-Loc™ system reduces cost and complexity. The Vac-Loc™ shown here is manually operated at the customer's option; however we could have installed the electro/pneumatic version just as easily.
There are many advantages to a remanufactured/modernized system.
- Reduced initial acquisition cost
- Ease of operation with modern computerized controls
- Higher rates of production and more consistent results
- Availability of spares
- Fast turnaround with our 'trade up' policy
Think of MAT-VAC Technologies, Inc.
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 MAT-VAC Technologies, Inc. new and innovative Vac-Loc™ load lock |
 Unlike conventional gate valve based designs, the MAT-VAC Vac-Loc™ uses a flapper valve design for lower cost operation while still maintaining high vacuum integrity. |
 When the Vac-Loc™ is open, the travel path is unobstructed. |
 The completed 8667 with new computer touch screen interface. |
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 The Vac-Loc™ gripper release cleanly releases the wafer. Alternate gripper designs are easily incorporated into the basic design to meet your specific needs. |
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 The self aligning nature of the flapper accepts mechanical tolerance variations. |
 The mechanism itself is electro/pneumatically operated for quiet reliable functioning. |
 The travel distance can be easily adjusted to your specific chamber requirements.
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Note the clean, uncluttered operator interface that reduces operator errors. |
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 Only MAT-VAC has the Vac-Loc™ technology! |
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 Our experienced engineers are capable of solving your most complex and demanding problems. |
 Note the clean and uncluttered craftsmanship in the PLC integration. Maintenance is eased and simplified by the neat and orderly wiring. |
 The front mounted panel makes maintenance access a snap. |
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 All new lines for water and air are used. |
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 Each unit is carefully packaged for direct shipment. The units are direct shipped to your factory from our facility without handling or storage risks and delays.
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 Each unit is installed on a shock mounted pallet for shipping. |
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 The accessories are also shock mounted for shipment. |
 Each machine is securely attached to the shock mount palette insure that it arrives in the same state it shipped in. |
 Another system has been given new life and is on its way! |
MAT-VAC Technologies, Inc. The experts at modernizing old 'classics'... |
